# US 8,751,979 B1 · Determining the gradient and Hessian of the image log slope for design rule optimization for accelerating source mask optimization (SMO)

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- Number: US 8,751,979 B1
- Document ID: US8751979B1
- Status: Granted
- Kind: B1
- Application number: 13/741,802
- Filed: 2013-01-15
- Granted: 2014-06-10
- Earliest claimed: 2009-07-02
- Assignees: ASML Netherlands B.V.
- Applicants: ASML Netherlands B.V.
- Inventors: Robert J. Socha
- Web page: https://patentgrep.com/patent/US8751979B1

## CPC

- G03F 7/705: {Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions}
- G03F 1/70: Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

The Hessian (second derivative) of the image log slope (ILS) can be quickly and accurately calculated without the need to use approximate methods from the gradient of the ILS with respect to mask transmission and source intensity. The Hessian has been traditionally calculated using a finite-difference approach. Calculating the Hessian through a finite-difference approach is slow and is an approximate method. The gradient of the ILS improves the speed of calculation of the Hessian, and thus accelerated SMO operation is realized. The results of ILS evaluation can be used in design for manufacturing (DFM) to suggest changes in the design rules to improve imaging. For a fixed illumination, this information can help remove forbidden pitches and help select design rules for 1-D and 2-D patterns on a mask design layout.

## Claims

### Claim 1

A computer-implemented method for improving a design of mask patterns to be imaged using a lithographic process by illuminating the mask patterns with an illumination source in a lithographic apparatus, the method comprising:
receiving an initial design layout of the mask patterns, wherein the mask patterns include a known critical dimension for which a calculated value of an image log slope (ILS) at one or more evaluation points on an image plane is below a predefined threshold value;
calculating a second order partial derivative of the ILS at the one or more evaluation points with respect to a first variable and a second variable, the first variable being associated with mask transmission, and, the second variable being associated with an intensity at a point on the illumination source; and
using the calculated second order partial derivative to determine a correction amount by which to adjust the critical dimension to improve the value of the ILS at the one or more evaluation points,
wherein the steps of the method are performed by the computer.

### Claim 2 (depends on 1)

The method of claim 1, wherein the method further comprises:
updating the design rules using the correction amount.

### Claim 3 (depends on 2)

The method of claim 2, wherein the initial design layout is obtained by performing an initial round of source mask optimization.

### Claim 4 (depends on 1)

The method of claim 1, wherein the calculated value of the second order partial derivative is used in an optimization process that determines the correction amount by which to adjust the critical dimension in the mask patterns in the initial design layout.

### Claim 5 (depends on 4)

The method of claim 4, wherein the optimization process iteratively converges towards a solution.

### Claim 6 (depends on 1)

The method of claim 1, wherein the method further comprises: calculating a first order derivative of the ILS at the one or more evaluation points with respect to the first variable, wherein the illumination source is fixed.

### Claim 7 (depends on 1)

The method of claim 1, wherein the method further comprises: calculating a first order derivative of the ILS at the one or more evaluation points with respect to the second variable, when the mask transmission is fixed.

### Claim 8 (depends on 1)

The method of claim 1, wherein the method further comprises:
calculating a first order derivative of the ILS at the one or more evaluation points with respect to the first variable; and,
calculating a first order derivative of the ILS at the one or more evaluation points with respect to the second variable,
wherein both the mask transmission and the illumination source are varying.

### Claim 9 (depends on 8)

The method of claim 8, wherein the method further comprises:
comparing the calculated value of the second order partial derivative with the calculated value of one or both of the first order derivatives to determine whether to adjust the illumination source or the mask transmission or both in order to perform an optimization process that determines the correction amount by which to adjust the critical dimension.

### Claim 10 (depends on 1)

The method of claim 1, wherein the one or more evaluation points comprise fragmentation points along which mask pattern is decomposed.

### Claim 11 (depends on 1)

The method of claim 1, wherein the one or more evaluation points comprise points at an edge of a feature included in the mask pattern.

### Claim 12 (depends on 1)

The method of claim 1, wherein the one or more evaluation points comprise points at an edge of a feature included in the mask pattern.

### Claim 13 (depends on 1)

The method of claim 1, wherein the one or more evaluation points comprise points at an arbitrary point within a feature included in the mask pattern.

### Claim 14 (depends on 3)

The method of claim 3, wherein the method further comprises: performing a further round of source mask optimization after correcting the mask patterns using the updated design rules.

### Claim 15

A non-transitory computer-readable medium containing instructions for a computer to improve a design of mask patterns to be imaged using a lithographic process by illuminating the mask patterns with an illumination source in a lithographic apparatus, the design improvement process comprising:
receiving an initial design layout of the mask patterns, wherein the mask patterns include a known critical dimension for which a calculated value of an image log slope (ILS) at one or more evaluation points on an image plane is below a predefined threshold value;
calculating a second order partial derivative of the ILS at the one or more evaluation points with respect to a first variable and a second variable, the first variable being associated with mask transmission, and, the second variable being associated with an intensity at a point on the illumination source; and
using the calculated second order partial derivative to determine a correction amount by which to adjust the critical dimension to improve the value of the ILS at the one or more evaluation points.

### Claim 16 (depends on 15)

The computer-readable medium of claim 15, wherein the design improvement process further comprises: updating the design rules using the correction amount.

### Claim 17 (depends on 15)

The computer-readable medium of claim 15, wherein the calculated value of the second order partial derivative is used in an optimization process that determines the correction amount by which to adjust the critical dimension.

### Claim 18 (depends on 17)

The computer-readable medium of claim 17, wherein the optimization process iteratively converges towards a solution.

### Claim 19 (depends on 15)

The computer-readable medium of claim 15, wherein the design improvement process further comprises: calculating a first order derivative of the ILS at the one or more evaluation points with respect to the first variable, wherein the illumination source is fixed.

### Claim 20 (depends on 15)

The computer-readable medium of claim 15, wherein the design improvement process further comprises: calculating a first order derivative of the ILS at the one or more evaluation points with respect to the second variable, when the mask transmission is fixed.

### Claim 21 (depends on 15)

The computer-readable medium of claim 15, wherein the design improvement process further comprises:
calculating a first order derivative of the ILS at the one or more evaluation points with respect to the first variable; and,
calculating a first order derivative of the ILS at the one or more evaluation points with respect to the second variable,
wherein both the mask transmission and the illumination source are varying.

### Claim 22 (depends on 21)

The computer-readable medium of claim 21, wherein the design improvement process further comprises:
comparing the calculated value of the second order partial derivative with the calculated value of one or both of the first order derivatives to determine whether to adjust the illumination source or the mask transmission or both in order to perform an optimization process that determines the correction amount by which to adjust the critical dimension.

### Claim 23

A computer-implemented method for accelerating a source mask optimization (SMO) process by adjusting mask patterns to be imaged using a lithographic process and an illumination source in a lithographic apparatus, the method comprising:
receiving an initial design layout of the mask patterns, wherein the mask patterns include a known critical dimension for which a calculated value of an image log slope (ILS) at one or more evaluation points on an image plane is below a predefined threshold value;
calculating a gradient of the ILS at the one or more evaluation points with respect to any one of a first variable and a second variable, the first variable being associated with mask transmission, and, the second variable being associated with an intensity at a point on the illumination source;
calculating a second order partial derivative of the ILS at the one or more evaluation points using the calculated gradient of the ILS with respect to the remaining variable that is not used in calculating the gradient of the ILS; and
using the calculated second order partial derivative to improve the value of the ILS at the one or more evaluation points by adjusting one or both of the mask patterns and the illumination source, thereby accelerating the SMO process,
wherein the steps of the method are performed by the computer.

### Claim 24 (depends on 23)

The method of claim 23, wherein the initial design layout is obtained by performing an initial round of source mask optimization.

### Claim 25 (depends on 24)

The method of claim 24, wherein the second order partial derivative is used to determine a correction amount by which to adjust the critical dimension in the mask patterns in the initial design layout to improve the value of the ILS at the one or more evaluation points.

### Claim 26 (depends on 25)

The method of claim 25, where the design rules are updated using the correction amount.

### Claim 27 (depends on 26)

The method of claim 26, wherein the method further comprises: performing a further round of source mask optimization after correcting the mask patterns using the updated design rules.