Method and device for reversing the feeding of sputter coating systems in clean rooms
AssigneeGrenzebach Maschinenbau GmbH
InventorRoland Franz
Life of this patent
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Abstract
The invention relates to a method and to a device for reversing the feeding of a sputter coating system, particularly when coating a photovoltaic module, in clean rooms, having the following characteristics: a) a transport frame (11) for receiving a substrate wafer (19) of a photovoltaic module, b) a rotary device having means for mounting the transport frame (11), having means for rotating the transport frame (11), and having means for transporting the transport frame (11), c) means for precisely aligning the rotary device relative to the sputter coating system, d) a detection device (18) for checking a sputter process, and computer program having a program code for performing the process steps.
Claims14
A device for reversing the feeding of a sputter coating system for the purpose of repeatedly applying sputter material having a different or the same composition, in clean rooms, comprising the following features:
- a) a transport frame for receiving a substrate wafer,
- b) a rotating unit having means for rotating the transport frame and having means for transporting the transport frame onto different guideways,
- c) means for aligning the rotating unit with respect to the sputter coating system,
- d) a detection unit for checking a sputter process,
- e) means for mounting the transport frame, comprising a rear fixing cylinder and a front fixing cylinder in an upper region two transport rollers in a lower region, wherein the rollers are each provided with a dedicated servodrive and mechanically moved parts are encapsulated in an emission-free manner and produced from abrasion-resistant material.
A method for reversing the feeding of a sputter coating system, for the purpose of repeatedly applying sputter material having a different or the same composition, in clean rooms, comprising the following features:
- a) a substrate wafer to be coated is conveyed by a transfer device into a transport frame and then into a rotating unit,
- b) the transport frame is mounted in the rotating unit by in each case two fixing cylinders on the left and right in the upper region, and also by the mount on transport rollers in the lower region on the left and right,
- c) the transport frame is rotated by a drive incorporated in the frame of the rotating unit,
- d) the transport frame is transported by transport roller drives that can guide on guideways in different directions,
- e) the rotating unit is aligned with respect to the guideways by the sensors via the drive of the rotating unit,
- f) a sputter process is checked by detection units, wherein the checking of the sputter process is present at least in the rotating unit of a transport frame and spacer elements being configured to operate in the manner of a scanner or being configured to check the entire area of a substrate wafer concurrently.
A device for reversing the feeding of a sputter coating system for the purpose of repeatedly applying sputter material having a different or the same composition, in clean rooms, comprising the following features:
- a) a transport frame for receiving a substrate wafer,
- b) a rotating unit configured to rotate the transport frame and transport the transport frame onto different guideways,
- c) an alignment unit configured to align the rotating unit with respect to the sputter coating system,
- d) a detection unit for checking a sputter process,
- e) a mounting unit configured to mount the transport frame, the mounting unit comprising a first fixing cylinder and a second fixing cylinder in a first region, and two transport rollers in a second region, wherein the rollers are each provided with a dedicated drive.
Dependencies are inferred from the claim text.