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US 8,747,598 B2Granted
Method of forming a permanently supported lamina
AssigneeGTAT Corporation
InventorsRobert Brainard, Bin Zhang
Life of this patent
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Abstract
A method is described for forming a permanently supported thin lamina using decomposable adhesives between a lamina and a temporary support element. The temporary support element may be bonded to a first surface of the lamina. A permanent support element may be applied to a second surface of the lamina, and the temporary support element debonded from the lamina by decomposing the adhesive.
Claims24
A method for forming a permanently supported thin lamina, the method comprising the steps of:
- a) obtaining a donor body comprising a first surface;
- b) implanting ions into the first surface of the donor body to define a cleave plane;
- c) exfoliating a lamina from the donor body at the cleave plane, wherein the first surface of the donor body is a first surface of the lamina, wherein the step of exfoliating the lamina forms a second surface on the lamina opposite the first surface of the lamina, and wherein the lamina has a thickness between the first surface and the second surface of less than 25 microns;
- d) bonding a temporary support element to either the first surface or the second surface of the lamina, wherein the bonding comprises applying a decomposable adhesive between the lamina and the temporary support element;
- e) applying a permanent support element to the lamina, to the opposite surface on which the temporary support element is bonded;
- and
- f) debonding the lamina from the temporary support element, wherein the debonding comprises decomposing the adhesive.
4 more elements
A method for forming a permanently supported thin lamina, the method comprising the steps of:
- a) obtaining a monocrystalline lamina having a first surface, a second surface, and a thickness between the first surface and the second surface, wherein the thickness is less than 25 microns, and wherein the lamina is free from any bound support;
- b) bonding a temporary support element to the first surface of the lamina, wherein the bonding comprises applying a decomposable adhesive between the lamina and the temporary support element;
- c) applying a permanent support element to the second surface of the lamina;
- and
- d) debonding the lamina from the temporary support element, wherein the debonding comprises decomposing the adhesive.
2 more elements
Dependencies are inferred from the claim text.