US 8,744,046 B2 · Method and apparatus of precisely measuring intensity profile of X-ray nanobeam

Abstract

Provided are a method and an apparatus of precisely measuring the intensity profile of an x-ray nanobeam, which can measure x-rays having different wavelengths with one knife edge and can perform optimal measurements corresponding to the depth of focus of an x-ray beam and the conditions of other measurement devices, using a dark field measurement method which enables precise measurements of the profile of an x-ray beam using a knife edge and using diffracted and transmitted x-rays. The knife edge (4) is formed of a heavy metal which advances the phase of an x-ray passing therethrough and is fabricated in such a manner that the thickness may change in the longitudinal direction continuously or in a stepwise fashion. The knife edge (4) is so set that an x-ray beam may traverse the knife edge (4) at such a thickness position as to achieve a phase shift in a range wherein a transmitted x-ray and a diffracted x-ray diffracted at the end of the knife edge may reinforce each other, and a superposed x-ray of the diffracted x-ray and the transmitted x-ray is measured by an x-ray detector.

Claims9

Dependent claims

A method for precise measurement of an X-ray nanobeam intensity distribution, comprising the steps of:

using a dark-field metrology to run a knife edge, the knife edge being made of a heavy metal, so as to cut across an X-ray beam and measure an X-ray intensity by an X-ray detector disposed behind the knife edge at a position geometrically dark with respect to an X-ray source;
measuring an X-ray intensity distribution in a cross section of the X-ray beam;
advancing a phase of an X-ray passing through the knife edge, prepared so as to change in thickness continuously or stepwise in a longitudinal direction, and set so as to cut across an X-ray beam at a position of a thickness as to obtain a phase shift with which a transmission X-ray and a diffraction X-ray diffracted by a leading end of the knife edge reinforce each other;
and
measuring with the X-ray detector an X-ray foamed by overlapping of the diffraction X-ray and the transmission X-ray.

2 more elements

An apparatus for precise measurement of an X-ray nanobeam intensity distribution, comprising:

an edge member that varies in thickness continuously or stepwise in a longitudinal direction and includes a knife edge with a leading end portion rectangular in cross section and disposed such that an inclination angle of a leading end surface becomes 1 mrad or less with respect to an optical axis of an X-ray beam;
a high-accurate moving stage that holds the edge member such that the knife edge is run in a direction that cuts across the X-ray beam and in a direction along a longer side of the knife edge;
and an X-ray detector that is disposed behind the knife edge at a position geometrically dark with respect to an X-ray source, wherein the knife edge is made of a heavy metal with the effect of advancing a phase of an X-ray passing through the knife edge and is set so as to cut across an X-ray beam at a position of a thickness as to obtain a phase shift with which a transmission X-ray and a diffraction X-ray diffracted by a leading end of the knife edge reinforce each other, and an X-ray formed by overlapping of the diffraction X-ray and the transmission X-ray is measured by the X-ray detector.

Dependencies are inferred from the claim text.

Method and apparatus of precisely measuring intensity profile of X-ray nanobeam

Life of this patent

Method and apparatus of precisely measuring intensity profile of X-ray nanobeam

Life of this patent

Abstract

Claims9