Method for stabilizing plasma ignition
AssigneeASM IP Holdings B.V.
InventorsRyu Nakano, Tsutomu Makino, Hisashi Takamizawa
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Abstract
A method for stabilizing plasma ignition in a continuous process conducted on a substrate, includes: applying a spike of RF power between an upper electrode and a lower electrode on which the substrate is placed, wherein the spike starts from zero power, jumps to a spike power, and then drops to a base power which is so low as to cause plasma ignition failure; and continuously applying RF power at the base power between the upper and lower electrode for a duration substantially longer than a duration of the spike to process the substrate. The spike is such that ignition failure is reduced.
Claims14
A method for stabilizing plasma ignition in a continuous process conducted on a substrate, comprising:
- applying a spike of RF power between an upper electrode and a lower electrode on which the substrate is placed, wherein the spike starts from zero power, jumps to a spike power, and then drops to a base power which is so low as to cause plasma ignition failure;
- and
- continuously applying RF power at the base power between the upper and lower electrode for a duration substantially longer than a duration of the spike to process the substrate,
- wherein the spike is such that ignition failure is reduced.
Dependencies are inferred from the claim text.