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US 8,742,308 B2Granted
Imaging array device structure with separate charge storage capacitor layer
AssigneeTeledyne Scientific & Imaging, LLC
InventorsJeffrey F. DeNatale, David J. Gulbransen, William E. Tennant, Alexandros P. Papavasiliou
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Abstract
An imaging array comprises a photodetector layer, a readout IC (ROIC) layer, and a charge storage capacitor layer which is distinct from the photodetector and ROIC layers; the layers are electrically interconnected to form the array. The capacitors within the charge storage capacitor layer are preferably micromachined; the charge storage capacitor layer can be an interposer layer or an outer layer.
Claims33
An imaging array, comprising:
- a photodetector layer;
- a readout integrated circuit (ROIC) layer;
- and
- a charge storage capacitor layer which is distinct from said photodetector and ROIC layers, said layers electrically interconnected to form an imaging array;
- wherein said charge storage capacitor layer comprises one or more micromachined capacitors;
- and
- wherein said micromachined capacitors are vertical capacitors, each of which comprises a base material having a microstructured surface coated with sequential conductive-insulating-conductive coating layers.
4 more elements
An imaging array, comprising:
- a photodetector layer;
- a readout integrated circuit (ROIC) layer;
- and
- a charge storage capacitor layer which is distinct from said photodetector and ROIC layers, said layers electrically interconnected to form an imaging array;
- wherein said charge storage capacitor layer comprises one or more micromachined capacitors;
- and
- wherein said micromachined capacitors are vertical capacitors, each of which comprises a base material having a microstructured surface coated with sequential conductive-insulating-conductive layers, whereby one of the conductive layers is provided by the conductivity of said base material.
4 more elements
A method of forming an imaging array, comprising:
- fabricating a photodetector layer;
- fabricating a readout integrated circuit (ROIC) layer separately from said detector layer;
- fabricating a charge storage capacitor layer separately from said photodetector and ROIC layers;
- and
- electrically interconnecting said layers to form an imaging array;
- wherein said step of fabricating a charge storage capacitor layer comprises fabricating one or more micromachined vertical capacitors, each of which comprises a base material having a microstructured surface coated with sequential conductive-insulating-conductive layers.
3 more elements
Dependencies are inferred from the claim text.