Resist composition for immersion exposure, method of forming resist pattern using the same, and fluorine-containing compound

A fluorine-containing compound represented by general formula (c-1-1) shown below:

• wherein each R independently represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group;
• X represents a linear or branched aliphatic hydrocarbon group, a monocyclic group having 2 hydrogen atoms removed therefrom, adamantane having 2 hydrogen atoms removed therefrom, isobornane having 2 hydrogen atoms removed therefrom, tricyclodecane having 2 hydrogen atoms removed therefrom, tetracyclododecane having 2 hydrogen atoms removed therefrom, a divalent aromatic hydrocarbon group, —O—, —C(═O)—, —C(═O)—O—, a carbonate bond (—O—C(═O)—O—), —NH—, —NR04— or a combination of a linear, branched or cyclic aliphatic hydrocarbon group or a divalent aromatic hydrocarbon group with any of —O—, —C(═O)—, —C(═O)—O—, a carbonate bond (—O—C(═O)—O—), —NH—, —NR04—, wherein R04 represents an alkyl group;
• and R2 represents a linear fluorinated hydrocarbon group of 1 to 5 carbon atoms.

A fluorine-containing compound comprising a structural unit represented by general formula (c-1-3) shown below:

• wherein each R independently represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group;
• X represents a linear or branched aliphatic hydrocarbon group, a monocyclic group having 2 hydrogen atoms removed therefrom, adamantane having 2 hydrogen atoms removed therefrom, isobornane having 2 hydrogen atoms removed therefrom, tricyclodecane having 2 hydrogen atoms removed therefrom, tetracyclododecane having 2 hydrogen atoms removed therefrom, a divalent aromatic hydrocarbon group, —O—, —C(═O)—, —C(═O)—O—, a carbonate bond (—O—C(═O)—O—), —NH—, —NR04— or a combination of a linear, branched or cyclic aliphatic hydrocarbon group or a divalent aromatic hydrocarbon group with any of —O—, —C(═O)—, —C(═O)—O—, a carbonate bond (—O—C(═O)—O—), —NH—, —NR04—, wherein R04 represents an alkyl group;
• and R2 represents a linear fluorinated hydrocarbon group of 1 to 5 carbon atoms.

A fluorine-containing compound represented by general formula (c-1-1) shown below:

• wherein each R independently represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group;
• X represents a methylene group, and R2 represents a branched fluorinated hydrocarbon group of 1 to 5 carbon atoms.

A fluorine-containing compound comprising a structural unit represented by general formula (c-1-3) shown below:

• wherein each R independently represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group;
• X represents a methylene group;
• and R2 represents a branched fluorinated hydrocarbon group of 1 to 5 carbon atoms.