# US 8,739,732 B2 · Plasma treatment container internal member, and plasma treatment apparatus having the plasma treatment container internal member > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,739,732 B2 - Document ID: US8739732B2 - Status: Granted - Kind: B2 - Application number: 10/477,759 - Filed: 2002-05-17 - Published: 2004-07-29 - Granted: 2014-06-03 - Earliest claimed: 2001-05-25 - Assignees: Tokyo Electron Limited - Applicants: Nobuyuki Nagayama; Hiroyuki Nakayama; Kouji Mitsuhashi - Inventors: Nobuyuki Nagayama; Hiroyuki Nakayama; Kouji Mitsuhashi - Web page: https://patentgrep.com/patent/US8739732B2 ## CPC - H01J 37/32477: {characterised by the means for protecting vessels or internal parts, e.g. coatings} - C23C 4/02: Pretreatment of the material to be coated, e.g. for coating on selected surface areas - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract A plasma treatment container internal member, which is used in a plasma treatment container for performing a process on an object to be treated by plasma, includes an anodic oxide coating formed on a surface of a base material of the plasma treatment container internal member by an anodic oxidation treatment using plasma discharge, and a thermally sprayed film formed on the anodic oxide coating. The anodic oxidation treatment includes immersing the base material in an alkaline organic solvent, and performing the plasma discharge in the alkaline organic solvent. ## Claims ### Claim 1 A plasma treatment container internal member disposed in a plasma treatment container for performing process on an object to be treated by plasma, comprising: an anodic oxide coating formed on a surface of a base material of the plasma treatment container internal member; and a thermally sprayed film formed on the anodic oxide coating and adhering to the anodic oxide coating with an adhesion greater than 40 MPa, said anodic oxide coating including a surface region in contact with the thermally sprayed film and an interior region having a porosity less than the surface region, wherein the anodic oxide coating is formed by an anodic oxidation treatment using plasma discharge to increase a porosity at a surface of the anodic oxide coating and the anodic oxidation treatment includes the steps of immersing the base material in an alkaline organic electrolyte, and performing the plasma discharge in the alkaline organic electrolyte. ### Claim 2 (depends on 1) The plasma treatment container internal member of claim 1, wherein the thermally sprayed film is formed on the as formed anodic oxide coating. ### Claim 3 (depends on 1) The plasma treatment container internal member of claim 1, wherein the anodic oxide coating is at least 10 μm in thickness. ### Claim 4 (depends on 1) A plasma treatment apparatus, comprising the plasma treatment container internal member of claim 1. ### Claim 5 (depends on 1) The plasma treatment container internal member of claim 1, wherein the thermally sprayed film is formed of a compound of a Group 3 element. ### Claim 6 (depends on 5) The plasma treatment container internal member of claim 5, wherein the compound of the Group 3 element is Al2O3 or Y2O3. ### Claim 7 A plasma treatment container internal member disposed in a plasma treatment container for performing process on an object to be treated by plasma, comprising: a thermally sprayed film provided on a surface of a base material of the plasma treatment container internal member, an anodic oxide coating including a barrier layer and a ceramic layer, wherein the barrier layer and the ceramic layer are consecutively laminated in that order between the base material and the thermally sprayed film, the ceramic layer includes a first and a second layer, the first layer formed on the barrier layer and the second layer formed on the first layer, and a porosity of the first layer is lower than that of the second layer, the thermally sprayed film adheres to the anodic oxide coating with an adhesion greater than 40 MPa. ### Claim 8 (depends on 7) The plasma treatment container internal member of claim 7, wherein the thermally sprayed film is formed on the as laminated ceramic layer. ### Claim 9 (depends on 7) The plasma treatment container internal member of claim 7, wherein a total thickness of the barrier layer and the ceramic layer is at least 10 μm. ### Claim 10 (depends on 7) A plasma treatment apparatus, comprising the plasma treatment container internal member of claim 7. ### Claim 11 (depends on 7) The plasma treatment container internal member of claim 7, wherein the thermally sprayed film is formed of a compound of a Group 3 element. ### Claim 12 (depends on 11) The plasma treatment container internal member of claim 11, wherein the compound of the Group 3 element is Al2O3 or Y2O3. ### Claim 13 A plasma treatment container internal member comprising: an anodic oxide coating formed on a surface of a base material of the plasma treatment container internal member; and a thermally sprayed film formed on the anodic oxide coating and adhering to the anodic oxide coating with an adhesion greater than 40 MPa, wherein said anodic oxide coating includes a surface region in contact with the thermally sprayed film and an interior region having a porosity less than the surface region. ### Claim 14 (depends on 13) The plasma treatment container internal member of claim 13, wherein the thermally sprayed film is formed of a compound of a Group 3 element. ### Claim 15 (depends on 14) The plasma treatment container internal member of claim 14, wherein the compound of the Group 3 element is Al2O3 or Y2O3. ### Claim 16 A plasma treatment apparatus comprising: a plasma treatment container; a plasma treatment container internal member disposed in the plasma treatment container; a plurality of gas discharge openings through which a processing gas is supplied to the plasma treatment container; and an electrode disposed in the plasma treatment container, wherein an object to be treated is adsorbed to be held on an upper surface of the electrode through an electrostatic chuck, wherein the plasma treatment container internal member includes; a base material; an anodic oxide coating formed on a surface of the base material by an anodic oxidation treatment which includes immersing the base material in an alkaline organic electrolyte and performing a plasma discharge in the alkaline organic electrolyte; and a thermally sprayed film formed on the anodic oxide coating, wherein the thermally sprayed film is adhered to the anodic oxide coating with an adhesion greater than 40 MPa. ### Claim 17 (depends on 16) The plasma treatment apparatus of claim 16, wherein a blast treatment is carried out on the surface of the base material before forming the anodic oxide coating. ### Claim 18 (depends on 16) The plasma treatment apparatus of claim 16, wherein the anodic oxide coating is a Kepla-Coat layer. ### Claim 19 (depends on 16) The plasma treatment apparatus of claim 16, wherein the thermally sprayed film is formed of a compound of a Group 3 element. ### Claim 20 (depends on 19) The plasma treatment apparatus of claim 19, wherein the compound of the Group 3 element is Al2O3 or Y2O3. ### Claim 21 (depends on 16) The plasma treatment apparatus of claim 16, wherein the electrode is supported by an elevating column which is lifted and lowered by a driving device. ### Claim 22 A plasma treatment apparatus comprising: a plasma treatment container; a plasma treatment container internal member disposed in the plasma treatment container; a plurality of gas discharge openings through which a processing gas is supplied to the plasma treatment container; and an electrode disposed in the plasma treatment container, wherein an object to be treated is adsorbed to be held on an upper surface of the electrode through an electrostatic chuck, wherein the plasma treatment container internal member includes; a base material; an anodic oxide coating formed on a surface of the base material by an anodic oxidation treatment which includes immersing the base material in an alkaline organic electrolyte and performing a plasma discharge in the alkaline organic electrolyte; and a thermally sprayed film formed on the anodic oxide coating, wherein the anodic oxide coating includes a barrier layer, a low porosity ceramic layer and a high porosity ceramic layer, the low porosity ceramic layer and the high porosity ceramic layer being formed on the barrier layer, and wherein the thermally sprayed film is adhered to the anodic oxide coating with an adhesion greater than 40 MPa. ### Claim 23 (depends on 22) The plasma treatment apparatus of claim 22, wherein a blast treatment is carried out on the surface of the base material before forming the anodic oxide coating. ### Claim 24 (depends on 22) The plasma treatment apparatus of claim 22, wherein the thermally sprayed film is formed of a compound of a Group 3 element. ### Claim 25 (depends on 22) The plasma treatment apparatus of claim 22 wherein the compound of the Group 3 element is Al2O3 orY2O3. ### Claim 26 (depends on 22) The plasma treatment apparatus of claim 22, wherein the electrode supported by an elevating column which is lifted and lowered by a driving device.