# US 8,739,628 B2 · Inertial sensor > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,739,628 B2 - Document ID: US8739628B2 - Status: Granted - Kind: B2 - Application number: 13/165,436 - Filed: 2011-06-21 - Published: 2012-06-21 - Granted: 2014-06-03 - Earliest claimed: 2010-12-15 - Assignees: Samsung Electro-Mechanics Co., Ltd. - Applicants: Jong Woon Kim; Liwei Lin; Minyao Mao; Heung Woo Park - Inventors: Jong Woon Kim; Liwei Lin; Minyao Mao; Heung Woo Park - Web page: https://patentgrep.com/patent/US8739628B2 ## CPC - G01P 15/125: by capacitive pick-up - G01P 15/09: by piezoelectric pick-up - G01P 15/123: {by piezo-resistive elements, e.g. semiconductor strain gauges} - G01P 2015/0842: {the mass being of clover leaf shape} - G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G}) ## Abstract An inertial sensor includes a plate-like substrate layer, a mass body, a support frame, a limit stop extending in the central direction of the mass body from the support frame, and a detection unit detecting the displacement of the displacement part. The inertial sensor adopts the limit stop limiting the downward displacement of the mass body to prevent the support portion of the mass body from being damaged. ## Claims ### Claim 1 An inertial sensor, comprising: a plate-like substrate layer including a displacement part provided at a central part thereof, a fixing part provided at the outside of the displacement part, and an elastic part connecting the displacement part to the fixing part so that the displacement part is displaceable with respect to the fixing part; a mass body provided at the bottom portion of the displacement part; a support frame provided at the bottom portion of the fixing part to support the substrate layer and surrounding the mass body; a limit stop extending in the central direction of the mass body from the support frame to correspond to the elastic part and disposed to be spaced by a predetermined gap from the bottom surface of the elastic part, and a detection unit detecting the displacement of the displacement part. ### Claim 2 (depends on 1) The inertial sensor as set forth in claim 1, further comprising: a mass body adhesive layer bonding the displacement part to the mass body; and a support frame adhesive layer bonding the fixing part to the support frame. ### Claim 3 (depends on 1) The inertial sensor as set forth in claim 1, wherein the substrate layer is provided with four slits having a polygonal shape of which one apex is opened and one apex of each slit is disposed toward the center of the substrate layer, the displacement part includes a central part provided on the center of the substrate layer toward one apex and four outside parts surrounded by each slit, the elastic part is provided between the pair of slits adjacent to each other, and the fixing part is provided at the edge portion of the substrate layer that is the outsides of four slits. ### Claim 4 (depends on 3) The inertial sensor as set forth in claim 3, wherein the mass body includes: a central portion provided on the bottom portion of the central part to correspond to the central part; and four wing portions extending from the central portion to correspond to the four outside parts. ### Claim 5 (depends on 4) The inertial sensor as set forth in claim 4, wherein each wing portion extends further outwardly than the outside part and the top surface of the wing portion overlaps with the bottom surface of the fixing part. ### Claim 6 (depends on 4) The inertial sensor as set forth in claim 4, wherein the limit stop is formed in four along between the pair of wing portions adjacent to each other and extends immediately before the central portion from the support frame. ### Claim 7 (depends on 3) The inertial sensor as set forth in claim 3, wherein four slits are each disposed on the quartered substrate layer in the same shape to be symmetrical with each other. ### Claim 8 (depends on 1) The inertial sensor as set forth in claim 1, wherein when a force exceeding a tolerance is applied to the mass body downwardly, a predetermined gap is set between the limit stop and the bottom surface of the elastic part so that the limit stop limits the downward displacement of the displacement part. ### Claim 9 (depends on 1) The inertial sensor as set forth in claim 1, wherein the support frame and the limit stop are simultaneously formed by etching a silicon substrate. ### Claim 10 (depends on 1) The inertial sensor as set forth in claim 1, wherein the height of the support frame is the same as that of the limit stop. ### Claim 11 (depends on 1) The inertial sensor as set forth in claim 1, wherein the detection unit is a piezoelectric element or a piezoresistive element disposed on the elastic part. ### Claim 12 An inertial sensor, comprising: a plate-like substrate layer; a mass body provided at the bottom portion of the central part of the substrate layer; a support frame provided on the bottom portion of the edge of the substrate layer to support the substrate layer and surrounding the mass body; a limit stop extending in the central direction of the mass body from the support frame and disposed to be spaced by a predetermined gap from the bottom surface of the substrate layer; and a detection unit detecting the displacement of the central part of the substrate layer. ### Claim 13 (depends on 12) The inertial sensor of claim 12, further comprising: a mass body adhesive layer bonding the bottom portion of the central part of the substrate layer to the mass body; and a support frame adhesive layer bonding the bottom portion of the edge of the substrate layer to the support frame. ### Claim 14 (depends on 12) The inertial sensor of claim 12, wherein the mass body is formed in a cylindrical shape. ### Claim 15 (depends on 12) The inertial sensor of claim 12, wherein the support frame is formed in a rectangular pillar shape having a cylindrical cavity formed at the center thereof. ### Claim 16 (depends on 12) The inertial sensor of claim 12, wherein the limit stop is formed in two or more at an equidistance along the inner side of the support frame and extends immediately before the mass body from the support frame. ### Claim 17 (depends on 12) The inertial sensor of claim 12, wherein when a force exceeding tolerance is applied to the mass body downwardly, a predetermined gap is set between the limit stop and the bottom surface of the substrate layer so that the limit stop limits the downward displacement of the displacement part. ### Claim 18 (depends on 12) The inertial sensor of claim 12, wherein the support frame and the limit stop are simultaneously formed by etching a silicon substrate. ### Claim 19 (depends on 12) The inertial sensor of claim 12, wherein the height of the support frame is the same as that of the limit stop. ### Claim 20 (depends on 12) The inertial sensor of claim 12, wherein the detection unit is a piezoelectric element or a capacitance element disposed on the top portion of the substrate layer.