# US 8,739,623 B2 · Moisture sensors on conductive substrates

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- Number: US 8,739,623 B2
- Document ID: US8739623B2
- Status: Granted
- Kind: B2
- Application number: 13/416,437
- Filed: 2012-03-09
- Published: 2013-09-12
- Granted: 2014-06-03
- Earliest claimed: 2012-03-09
- Assignees: University of Kentucky Research Foundation
- Applicants: Zhi David Chen; Ibrahim Yucedag
- Inventors: Zhi David Chen; Ibrahim Yucedag
- Web page: https://patentgrep.com/patent/US8739623B2

## CPC

- G01N 27/223: {for determining moisture content, e.g. humidity (rain detectors on vehicle windows B60S1/0825)}
- Y10T 29/49117: Conductor or circuit manufacturing
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A moisture sensor includes a first electrode (a conductive substrate) having a first sensor portion and a first terminal portion as well as a second electrode having a second sensor portion and a second terminal portion. The moisture sensor also includes a layer of porous dielectric material sandwiched between the first sensor portion and the second sensor portion. Further the moisture sensor includes a layer of dense insulating material sandwiched between the first terminal portion and the second terminal portion. Leads are then connected to the two terminal portions.

## Claims

### Claim 1

A moisture sensor, comprising;
a first electrode, having a first sensor portion and a first terminal portion;
a layer of porous dielectric material deposited on said first sensor portion;
a layer of dense insulating material deposited on said first terminal portion; and
a second electrode having a second sensor portion and a second terminal portion wherein the second sensor portion is deposited on the porous dielectric material, and the second terminal portion is deposited on the layer of dense insulating material.

### Claim 2 (depends on 1)

The sensor of claim 1 further including a first lead connected to said first terminal portion and a second lead connected to said second terminal portion.

### Claim 3 (depends on 2)

The sensor of claim 2 wherein said second lead is connected to said second terminal portion by a conductive adhesive.

### Claim 4 (depends on 3)

The sensor of claim 3, wherein said first terminal portion includes an aperture and said first lead is connected to said first terminal portion by a fastener secured in said aperture.

### Claim 5 (depends on 1)

The sensor of claim 1, wherein said second electrode includes a step between said second sensor portion and said second terminal portion.

### Claim 6 (depends on 1)

The sensor of claim 1, wherein said first electrode is made from aluminum.

### Claim 7 (depends on 1)

The sensor of claim 1, wherein said second electrode is made from a material selected from a group consisting of a conductive metal film, a conductive metal alloy film, a gold film, a platinum film, a palladium film and a gold/titanium film.

### Claim 8 (depends on 1)

The sensor of claim 1, wherein said layer of dielectric material is made from porous alpha-alumina.

### Claim 9 (depends on 1)

The sensor of claim 1, wherein said layer of insulating material is made from a material selected from a group consisting of silicon nitride, silicon oxynitride, aluminum oxide, hafnium oxide, hafnium silicon oxide, hafnium silicon oxynitride, silicon dioxide and mixtures thereof.

### Claim 10 (depends on 1)

The sensor of claim 1, wherein said first electrode is made of aluminum, said second electrode is made from gold film, said layer of dielectric material is porous alpha alumina and said layer of insulating material is dense silicon dioxide.

### Claim 11 (depends on 1)

The sensor of claim 1 wherein said layer of insulating material has a thickness of between about 0.2 μm and about 10.0 μm.

### Claim 12 (depends on 1)

The sensor of claim 1 wherein said layer of insulating material has a thickness of between 1.0 μm and about 2.0 μm.

### Claim 13

A method of manufacturing a moisture sensor comprising:
depositing a layer of insulating material on a first terminal portion of a first electrode;
providing a layer of dielectric material on a first sensor portion of said first electrode;
depositing a second electrode over said layer of insulating material and said layer of dielectric material so as to produce a sensor assembly wherein said second electrode has a second sensor portion overlying said layer of dielectric material and a second terminal portion overlying said layer of insulating material.

### Claim 14 (depends on 13)

The method of claim 13 further including connecting a first lead to said first terminal portion and a second lead to said second terminal portion.

### Claim 15 (depends on 14)

The method of claim 14, including using a conductive adhesive to connect said second lead to said second terminal portion.

### Claim 16 (depends on 15)

The method of claim 15, further including providing an aperture in said first terminal portion before providing said insulating layer on said first terminal portion.

### Claim 17 (depends on 16)

The method of claim 16, further including connecting said first lead to said first terminal portion by securing a fastener in said aperture in said first terminal portion.