# US 8,739,429 B2 · Systems and methods for drying a rotating substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,739,429 B2 - Document ID: US8739429B2 - Status: Granted - Kind: B2 - Application number: 13/633,843 - Filed: 2012-10-02 - Published: 2013-07-04 - Granted: 2014-06-03 - Earliest claimed: 2006-01-18 - Assignees: Akrion Systems, LLC - Applicants: Akrion Systems, LLC - Inventors: Zhi Lewis Liu; Hanjoo Lee; Ismail Kashkoush - Web page: https://patentgrep.com/patent/US8739429B2 ## CPC - H10P 72/0408: {for drying} - H10P 72/0406: {for cleaning followed by drying, rinsing, stripping, blasting or the like} - H10P 72/0414: {using mainly spraying means, e.g. nozzles} - C11D 2111/20: Industrial or commercial equipment, e.g. reactors, tubes or engines - C11D 2111/22: Electronic devices, e.g. PCBs or semiconductors - C11D 2111/44: Multi-step processes - Y10T 428/24802: Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] - Y10T 428/28: Web or sheet containing structurally defined element or component and having an adhesive outermost layer - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - C11D: DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract A system for drying a surface of a substrate is provided. The system for drying a surface of a substrate comprising: a rotary support; a first dispenser fluidly coupled to a source of liquid, the first dispenser positioned above the surface of the substrate so as to be capable of applying a film of the liquid to the surface of the substrate; a second dispenser fluidly coupled to a source of drying fluid with a supply line, the second dispenser positioned above the surface of the substrate so as to be capable of applying the drying fluid to the surface of the substrate; and a proportional valve operably coupled to the supply line between the second dispenser and the source of drying fluid, the proportional valve capable of being incrementally adjusted from a closed position to an open position. ## Claims ### Claim 1 A system for drying a surface of a substrate comprising: a rotary support; a first dispenser fluidly coupled to a source of liquid, the first dispenser positioned above the surface of the substrate for applying a film of the liquid to the surface of the substrate; a second dispenser fluidly coupled to a source of drying fluid with a supply line, the second dispenser positioned above the surface of the substrate for applying the drying fluid to the surface of the substrate, wherein the liquid and the drying fluid are separately applied to the surface of the substrate via the first and second dispensers; and a proportional valve operably coupled to the supply line between the second dispenser and the source of drying fluid, the proportional valve capable of being incrementally adjusted from a closed position to an open position. ### Claim 2 (depends on 1) The system of claim 1 further comprising a pneumatic valve operably coupled to the supply between the proportional valve and the source of drying fluid. ### Claim 3 A system for drying a surface of a substrate comprising: a rotary support; an assembly having a pivotably mounted first dispenser and a second dispenser, the assembly supported above the surface of the substrate; indicia marks on the assembly for indicating an angle at which the first dispenser is oriented with respect to the surface of the substrate; means for translating the assembly in a direction substantially parallel to the surface of the substrate; and a knob fluidly coupled to the first dispenser for adjusting the angle at which the first dispenser is oriented with respect to the surface of the substrate. ### Claim 4 (depends on 3) The system of claim 3 wherein the indicia marks comprises a. plurality of circumferentially spaced lines on the housing and a single line on the knob. ### Claim 5 A system for drying a surface of a substrate comprising: a rotary support for supporting a substrate in a substantially horizontal orientation within a process chamber; means for applying a. film of liquid to the surface of the substrate; means for applying a drying fluid to the surface of the substrate; and a splash guard surrounding at least a portion of the periphery of the substrate, the splash guard having an inner surface that is formed of or coated with a hydrophobic material. ### Claim 6 (depends on 5) The system of claim 5 wherein all areas of the splash guard that are susceptible of being contacted with liquid are constructed entirely of the hydrophobic material. ### Claim 7 (depends on 5) The system of claim 5 wherein the inner surface of the splash guard is coated with the hydrophobic material. ### Claim 8 (depends on 5) The system of claim 5 wherein the splash guard is constructed entirely of the hydrophobic material. ### Claim 9 (depends on 6) The system of claim 6 wherein the hydrophobic material is Polypropylene. ### Claim 10 (depends on 1) The system of claim 1 wherein the first dispenser applies the liquid at a first location on the surface of the substrate and the second dispenser applies the drying fluid at a second location on the surface of the substrate, the first and second locations being different. ### Claim 11 (depends on 1) The system of claim 1 further comprising: a third dispenser fluidly coupled to the source of drying fluid with a second supply line, the third dispenser positioned above the surface of the substrate for applying the drying fluid to the surface of the substrate; and a second proportional valve operably coupled to the second supply line between the third dispenser and the source of drying fluid, the second proportional valve capable of being incrementally adjusted from a closed position to an open position. ### Claim 12 (depends on 11) The system of claim 11 wherein the first and second proportional valves are independently adjustable. ### Claim 13 (depends on 11) The system of claim 11 wherein the first dispenser applies the liquid at a first location on the surface of the substrate, the second dispenser applies the drying fluid at a second location on the surface of the substrate, and the third dispenser applies the drying fluid at a third location on the surface of the substrate, each of the first, second and third locations being different.