Systems and methods for creating crystallographic-orientation controlled poly-silicon films
AssigneeThe Trustees of Columbia University in the City of New York
InventorsJames S. Im, Paul C. van der Wilt
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Abstract
In accordance with one aspect, the present invention provides a method for providing polycrystalline films having a controlled microstructure as well as a crystallographic texture. The methods provide elongated grains or single-crystal islands of a specified crystallographic orientation. In particular, a method of processing a film on a substrate includes generating a textured film having crystal grains oriented predominantly in one preferred crystallographic orientation; and then generating a microstructure using sequential lateral solidification crystallization that provides a location-controlled growth of the grains orientated in the preferred crystallographic orientation.
Claims13
A system for processing a film on a substrate, comprising:
- at least one laser for generating a plurality of laser beam pulses;
- a film support for positioning the film that is capable of movement in at least one direction;
- a mask support;
- optics for directing a first set of laser beam pulses through a first mask to generate a textured film;
- optics for directing a second set of laser beam pulses through a second mask onto the textured film;
- and
- a controller for controlling the movement of the film support and mask support in conjunction with frequency of the first set of and second set of laser beam pulses.
A device comprising a polycrystalline thin film, comprising:
- a polycrystalline thin film having periodically located grains in which each of the grains are predominantly of one crystallographic orientation.
Dependencies are inferred from the claim text.