Touch panel
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsHikaru Tamura, Munehiro Kozuma
Life of this patent
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Abstract
A touch sensor (touch panel) which can be formed over the same substrate as a display portion is provided. Alternatively, a touch sensor (touch panel) which does not cause degradation in the quality of an image displayed on a display portion is provided. The touch panel includes a light-emitting element and a microstructure in which a pair of electrodes facing each other is isolated with an insulating material. As the insulating material, an elastic material or a material having a hole is used so that a filler layer formed using the insulating material can be deformed when a movable portion operates. It is preferable to use a material which is softened or hardened by certain treatment (e.g., heat treatment or chemical treatment) after formation.
Claims25
A touch panel comprising:
- a microstructure over a first substrate, the microstructure comprising a lower electrode, an upper electrode over the lower electrode and a filler layer between the lower electrode and the upper electrode;
- a thin film transistor over the first substrate, the thin film transistor comprising a gate electrode and a semiconductor layer;
- a conductive layer over the first substrate, the conductive layer being in contact with the semiconductor layer;
- an insulating layer over the thin film transistor;
- a light-emitting element over the first substrate, the light-emitting element comprising a first electrode electrically connected to the conductive layer and over the insulating layer, a light-emitting layer over the first electrode and a second electrode over the light-emitting layer;
- a partition wall for covering an end portion of the first electrode and the microstructure, the partition wall having an opening overlapping with the filler layer;
- and
- a spacer over the upper electrode, the spacer overlapping with the filler layer,
- wherein the spacer is provided so as to fill the opening in the partition wall,
- wherein the microstructure does not overlap with the light-emitting layer,
- wherein the first electrode of the light-emitting element and the upper electrode of the microstructure are spaced from each other,
- wherein the lower electrode is formed using the same material as the gate electrode, and
- wherein the upper electrode is formed using the same material as the first electrode.
A touch panel comprising:
- a microstructure over a first substrate, the microstructure comprising a lower electrode, an upper electrode over the lower electrode and a filler layer between the lower electrode and the upper electrode;
- a thin film transistor over the first substrate, the thin film transistor comprising a gate electrode and a semiconductor layer;
- a conductive layer over the first substrate, the conductive layer being in contact with the semiconductor layer;
- an insulating layer over the thin film transistor;
- a light-emitting element over the first substrate, the light-emitting element comprising a first electrode electrically connected to the conductive layer and over the insulating layer, a light-emitting layer over the first electrode and a second electrode over the light-emitting layer;
- a partition wall for covering an end portion of the first electrode and the microstructure, the partition wall having an opening overlapping with the filler layer;
- and
- a spacer over the upper electrode, the spacer overlapping with the filler layer,
- wherein the spacer is provided so as to fill the opening in the partition wall,
- wherein the microstructure does not overlap with the light-emitting layer,
- wherein the first electrode of the light-emitting element and the upper electrode of the microstructure are spaced from each other,
- wherein the lower electrode is formed using the same material as the conductive layer, and
- wherein the upper electrode is formed using the same material as the first electrode.
A method for manufacturing a touch panel, the method comprising the steps of:
- forming a gate electrode over a substrate;
- forming an insulating film over the gate electrode;
- forming a semiconductor layer over the insulating film;
- forming a first conductive layer and a lower electrode over the insulating film, wherein a part of the first conductive layer overlaps the semiconductor layer;
- forming an insulating layer over the first conductive layer and the lower electrode;
- forming an hole in the insulating layer, wherein the hole overlaps the lower electrode;
- forming a filler layer in the hole;
- forming a first electrode and an upper electrode spaced from each other, wherein the first electrode is electrically connected to the semiconductor layer and a part of the upper electrode overlaps the filler layer;
- forming a partition wall for covering an end portion of the first electrode and the upper electrode over the insulating layer;
- forming an opening in the partition wall, the opening overlapping with the filler layer;
- forming a spacer so as to fill the opening, wherein the spacer overlaps the filler layer;
- forming a light-emitting layer over the first electrode;
- and
- forming a second electrode over the light-emitting layer,
- wherein the lower electrode, the filler layer, the upper electrode and the spacer do not overlap with the light-emitting layer.
Dependencies are inferred from the claim text.