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US 8,720,370 B2Granted
Methods and apparatuses for roll-on coating
AssigneeDynamic Micro System Semiconductor Equipment GmbH
InventorLutz Rebstock
Life of this patent
Estimating the term…
Abstract
Coating rollers accepting liquid media provide liquid chemicals to substrates for depositing a thin coating layer on the flat substrates, such as semiconductors or panels. The liquid media is cooled to a life-preserving temperature while shielded from the thermal energy heating the substrates to prevent degrading the liquid media. Physical barrier or temperature barrier can be established in vicinities of the rollers to further limit exposing the liquid media to high temperature.
Claims20
A deposition system for coating a substrate, comprising:
- a heating mechanism to heat the substrate;
- one or more coating rollers, each coating roller comprising a porous layer for accepting and retaining a liquid to transfer to the substrate by rollingly contact;
- a temperature controlling device coupled to the liquid to control the liquid temperature to be below room temperature,
- a liquid reservoir to provide the liquid to the one or more coating rollers,
- wherein the one or more coating rollers contact the liquid in the liquid reservoir for accepting the liquid,
- wherein the temperature controlling device is coupled to the liquid within the liquid reservoir,
- a physical barrier surrounding the one or more coating rollers, the physical barrier comprising restrictive fluid communication between two portions of the liquid in the liquid reservoir isolated by the physical barrier,
- a temperature controlling device coupled to the physical barrier to establish a temperature gradient between the two portions of the liquid in the liquid reservoir.
5 more elements
An in-line deposition system for coating a substrate, comprising:
- one or more transport rollers for transport the substrate along the in-line deposition system;
- a substrate heater to heat the substrate;
- a liquid reservoir containing a liquid;
- a cooling device coupled to the liquid reservoir for cooling the liquid to below room temperature,
- one or more coating rollers, each coating gin roller comprising a porous layer contacting the liquid from the liquid reservoir to transfer the liquid to the substrate by rollingly contact,
- wherein the cooling device comprises a device having a heated area and a cooling area with the heated area facing the one or more coating rollers and the cooling area facing the liquid in the liquid reservoir.
3 more elements
A deposition system for coating a substrate, comprising:
- a heating mechanism to heat the substrate;
- one or more coating rollers, each coating roller comprising a porous layer for accepting and retaining a liquid to transfer to the substrate by rollingly contact;
- a temperature controlling device coupled to the liquid to control the liquid temperature to be below room temperature,
- a liquid reservoir to provide the liquid to the one or more coating rollers,
- wherein the one or more coating rollers contact the liquid in the liquid reservoir for accepting the liquid,
- wherein the temperature controlling device is coupled to the liquid within the liquid reservoir,
- a physical barrier surrounding the one or more coating rollers, the physical barrier comprising restrictive fluid communication between two portions of the liquid in the liquid reservoir isolated by the physical barrier,
- a temperature barrier surrounding the one or more coating rollers, the temperature barrier creating a temperature gradient between two portions of the liquid in the liquid reservoir isolated by the temperature barrier.
5 more elements
An in-line deposition system for coating a substrate, comprising:
- one or more transport rollers for transport the substrate along the in-line deposition system;
- a substrate heater to heat the substrate;
- a liquid reservoir containing a liquid;
- a cooling device coupled to the liquid reservoir for cooling the liquid to below room temperature;
- one or more coating rollers, each coating roller comprising a porous layer contacting the liquid from the liquid reservoir to transfer the liquid to the substrate by rollingly contact;
- a physical barrier surrounding the one or more coating rollers, the physical barrier comprising restrictive fluid communication between two portions of the liquid in the liquid reservoir isolated by the physical barrier;
- and
- a temperature controlling device coupled to the physical barrier to establish a temperature gradient between the two portions.
5 more elements
An in-line deposition system for coating a substrate, comprising:
- one or more transport rollers for transport the substrate along the in-line deposition system;
- a substrate heater to heat the substrate;
- a liquid reservoir containing a liquid;
- a cooling device coupled to the liquid reservoir for cooling the liquid to below room temperature;
- one or more coating rollers, each coating roller comprising a porous layer contacting the liquid from the liquid reservoir to transfer the liquid to the substrate by rollingly contact;
- a physical barrier surrounding the one or more coating rollers, the physical barrier comprising restrictive fluid communication between two portions of the liquid in the liquid reservoir isolated by the physical barrier;
- and
- a temperature barrier surrounding the one or more coating rollers, the temperature barrier creating a temperature gradient between two portions of the liquid in the liquid reservoir isolated by the temperature barrier.
5 more elements
Dependencies are inferred from the claim text.