Photosensitive charge-coupled device comprising vertical electrodes

A charge transfer device formed in a semiconductor substrate and comprising:

• an array of slab electrodes arranged in rows and columns, said rows corresponding to a charge transfer direction and each row having a plurality of slab electrodes, wherein the slab electrodes extend in grooves with insulated walls into the semiconductor substrate and are oriented with broad faces parallel to the charge transfer direction;
• and
• charge accumulation and transfer regions defined by pairs of slab electrodes in adjacent rows, wherein a charge accumulation and transfer region comprises a single volume delimited by a pair of electrodes of a same column in an N-type layer having a thickness substantially equal to a depth of the slab electrodes.