# US 8,715,789 B2 · Chemical vapor deposition for an interior of a hollow article with high aspect ratio

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- Number: US 8,715,789 B2
- Document ID: US8715789B2
- Status: Granted
- Kind: B2
- Application number: 12/970,183
- Filed: 2010-12-16
- Published: 2011-06-23
- Granted: 2014-05-06
- Earliest claimed: 2009-12-18
- Assignees: Sub-One Technology, Inc.
- Applicants: Deepak Upadhyaya; Karthik Boinapally; William J. Boardman; Matthew MaMoody; Thomas B. Casserly; Pankaj Jyoti Hazarika; Duc Doan
- Inventors: Deepak Upadhyaya; Karthik Boinapally; William J. Boardman; Matthew MaMoody; Thomas B. Casserly; Pankaj Jyoti Hazarika; Duc Doan
- Web page: https://patentgrep.com/patent/US8715789B2

## CPC

- H01J 37/32568: {Relative arrangement or disposition of electrodes; moving means}
- C23C 16/045: {Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates}
- C23C 16/26: Deposition of carbon only
- C23C 16/503: using DC or AC discharges
- H01J 37/32394: {Treating interior parts of workpieces}
- H01J 37/32449: {Gas control, e.g. control of the gas flow}
- H01J 37/32577: {Electrical connecting means}
- H01J 37/32596: {Hollow cathodes}
- Y10T 428/13: Hollow or container type article [e.g., tube, vase, etc.]
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A method and apparatus for plasma enhanced chemical vapor deposition to an interior region of a hollow, tubular, high aspect ratio workpiece are disclosed. A plurality of anodes are disposed in axially spaced apart arrangement, to the interior of the workpiece. A process gas is introduced into the region. A respective individualized DC or pulsed DC bias is applied to each of the anodes. The bias excites the process gas into a plasma. The workpiece is biased in a hollow cathode arrangement. Pressure is controlled in the interior region to maintain the plasma. An elongated support tube arranges the anodes, and receives a process gas tube. A current splitter provides a respective selected proportion of a total current to each anode. One or more notch diffusers or chamber diffusers may diffuse the process gas or a plasma moderating gas. Plasma impedance and distribution may be controlled using various means.

## Claims

### Claim 1

A method for plasma enhanced chemical vapor deposition (CVD) to an interior surface of a hollow tubular high aspect ratio workpiece, the method comprising simultaneously coating the entire interior surface as a single section by:
providing at least three anodes in axially spaced apart arrangement along an entire lengthwise axis of an elongated interior of a hollow tubular workpiece of high aspect ratio greater than or equal to about thirty to one;
providing an elongated support tube dimensioned to reside in the elongated interior of the workpiece along its entire length and arranging the anodes in spaced apart relation inside of the elongated support tube, wherein a ratio of a spacing between anodes to an interior diameter of the hollow tubular workpiece is between about twenty to one and about one to one;
the workpiece being biased as a cathode and the elongated support tube is allowed to float electrically or be biased as a cathode so to form a plasma region in the interior of the workpiece between the support tube and workpiece, the support tube having a set of holes therein on all sides situated in proximity to the anodes within the support tube so as to allow electron flow between anodes and the plasma region;
introducing a CVD process gas into the entire plasma region in the interior of the workpiece;
applying a respective individualized DC or pulsed DC bias to each of the plurality of anodes to excite the process gas into a plasma; and
controlling a pressure of the process gas in the interior of the workpiece to maintain a plasma.

### Claim 2 (depends on 1)

The method of claim 1 wherein maintaining a plasma includes maintaining a hollow cathode effect in the plasma.

### Claim 3 (depends on 1)

The method of claim 1 wherein introducing a process gas into the interior region of the workpiece includes routing the process gas through one or more gas diffusers.

### Claim 4 (depends on 1)

The method of claim 1 wherein the interior region of the workpiece is oriented horizontally and the process gas is introduced predominantly in a lower half of the interior region of the workpiece.

### Claim 5 (depends on 1)

The method of claim 1 further comprising introducing an anode gas in a vicinity of at least one of the plurality of anodes.

### Claim 6 (depends on 1)

The method of claim 1 further comprising introducing a plasma moderating gas into the interior region of the workpiece.

### Claim 7 (depends on 6)

The method of claim 6 wherein the process gas is introduced into a first region and the plasma moderating gas is introduced into a second region, the first and second regions being within the interior region of the workpiece and opposing each other relative to the lengthwise axis.

### Claim 8 (depends on 6)

The method of claim 6 wherein the plasma moderating gas is introduced predominantly in a mid-length region of the interior region of the workpiece.

### Claim 9 (depends on 1)

The method of claim 1 wherein the CVD process gas includes constituents of a diamond-like coating or a doped diamond-like coating.

### Claim 10 (depends on 1)

The method of claim 1 wherein the CVD process gas includes constituents of a diamond-like coating having a dopant that includes silicon or germanium.

### Claim 11 (depends on 1)

The method of claim 1 further comprising electrically supplying a current and splitting the supplied current at a respective selected proportion to each of the plurality of anodes.

### Claim 12 (depends on 1)

The method of claim 1, wherein a differential mode is used in establishing current to each of said anodes.

### Claim 13 (depends on 1)

The method of claim 1, wherein during said method steps to maintain a plasma, also controlling axial temperature profile along said high aspect ratio workpiece.

### Claim 14

A method for plasma enhanced chemical vapor deposition (CVD) to an interior region of a hollow tubular high aspect ratio workpiece, wherein the interior region of the workpiece is oriented horizontally, the method comprising coating the interior region as a single section by:
providing at least three anodes in axially spaced apart arrangement along an entire lengthwise axis of an elongated interior region of a hollow tubular workpiece of high aspect ratio greater than or equal to about thirty to one;
introducing a CVD process gas into the interior region of the workpiece;
introducing a plasma moderating gas into the interior region of the workpiece, the plasma moderating gas being introduced predominantly in an upper half of the interior region of the workpiece;
applying a respective individualized DC or pulsed DC bias to each of the plurality of anodes to excite the process gas into a plasma; and
controlling a pressure of the process gas in the interior region of the workpiece to maintain a plasma.