Micro-electromechanical systems (MEMS) microphone and method of manufacturing the same
AssigneeElectronics and Telecommunications Research Institute
InventorsJae Woo Lee, Kang Ho Park, Jong Dae Kim
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Abstract
Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufacturing are reduced due to the simplified manufacturing process, the manufacturing throughput is improved, and since durability of the MEMS microphone is improved, system stability against the external environment is improved.
Claims11
A method of manufacturing a micro-electromechanical systems (MEMS) microphone, the method comprising:
- sequentially forming a lower insulating layer and a lower electrode on a substrate;
- etching portions of the lower insulating layer and the lower electrode to form first and second rear acoustic chamber vent holes through which a rear acoustic chamber is formed;
- forming a sacrificial layer on the lower electrode;
- forming a diaphragm including a diaphragm support and a side hole for removing the sacrificial layer on the sacrificial layer;
- etching the sacrificial layer through the side hole to form a vibration cavity;
- and
- etching the inside of the substrate at a predetermined depth through the first and second rear acoustic chamber vent holes to form the rear acoustic chamber.
Dependencies are inferred from the claim text.