Method for detaching and removing a semiconductor chip from a foil
AssigneeEsec AG
InventorStefan Behler
Life of this patent
Estimating the term…
Abstract
The detachment and removal of a semiconductor chip from a foil occurs in accordance with the invention in three phases. In the first phase there is a partial detachment of the semiconductor chip from the foil with mechanical means, but without the participation of a chip gripper. In the second phase the semiconductor chip is further detached from the foil, with the semiconductor chip being held by the chip gripper. In the third phase the chip gripper is lifted and moved away.
Claims4
A method for detaching and removing a semiconductor chip from a foil, in which a chip ejector supports the detachment of the semiconductor chip from the foil and a chip gripper takes up the semiconductor chip, with the chip ejector having a support surface on which the foil rests, the method comprising a first phase without any participation of the chip gripper, a subsequent second phase and a subsequent third phase, the first phase comprising the steps:
- providing the next semiconductor chip to be removed on the support surface of the chip ejector at a position, where the semiconductor chip will be grasped by the chip gripper in the second phase, the semiconductor chip still completely adhering to the foil;
- and then
- supplying a vacuum to the chip ejector in order to tightly hold the foil on the chip ejector;
- and then
- weakening of an adhesive bond between the semiconductor chip and the foil by partially detaching the foil from the provided semiconductor chip with mechanical means, wherein at the end of the weakening, the semiconductor chip is held by the foil to such an extent that firstly the semiconductor chip is bent or curved at most to the extent that a camera is able to take a picture of the semiconductor chip that can be evaluated and that secondly the semiconductor chip cannot yet be lifted by the chip gripper from the foil without damaging or destroying the semiconductor chip, and then
- taking a picture of the semiconductor chip and determining its position or deviation of its actual position from its target position, respectively;
- the second phase comprising the steps:
- lowering the chip gripper until the chip gripper touches the surface of the semiconductor chip;
- supplying a vacuum to the chip gripper in order to tightly hold the semiconductor chip;
- and then
- further detaching the foil from the provided semiconductor chip with support by the chip ejector, wherein at the end of the second phase, the foil is either completely detached from the semiconductor chip or the foil touches the semiconductor chip only over a small percentage of the surface of a bottom side;
- and
- the third phase comprising the step:
- lifting and moving the chip gripper away from the foil.
Dependencies are inferred from the claim text.