Control system of substrate processing apparatus, collecting unit, substrate processing apparatus and control method of the substrate processing apparatus
AssigneeHitachi Kokusai Electric Inc.
InventorsNorihiko Kataoka, Shinichiro Mori
Life of this patent
Estimating the term…
Abstract
There is provided a control system of a substrate processing apparatus, comprising: a collecting unit for collecting data from each component that constitutes a substrate processing apparatus, the collecting unit further comprising at least: a buffer for temporarily storing collected data; and a sorting part for rearranging the collected data, based on time data attached to the collected data.
Claims12
A control system for high frequent data collection between at least one of a host and a database of a semiconductor manufacturing plant side and a substrate processing apparatus having a plurality of components, the control system comprising:
- a collecting unit configured to collect data generated in each component of the substrate processing apparatus, the collecting unit including:
- a buffer configured to temporarily store the collected data;
- and
- a sorting part configured to rearrange the collected data to a time series, based on time data attached to the collected data and store the rearranged data in the buffer, when the collected data is stored in the buffer;
- and
- a controller configured to attach the time data showing a collection time to the data generated in each component, and to transfer the data having the time data attached to the collecting unit, the controller including:
- a control part for controlling each component based on a recipe for applying a prescribed processing to a substrate, the control part being configured to receive the data generated in each component, and the control part being configured to attach the time data to the received data, and
- an operation part for editing a target recipe, the operation part being configured to:
- (i) receive the data generated in each component, attach the time data to the received data, and transfer the data attached to the time data to the collecting unit, and (ii) receive the data attached to the time data by the control part and transfer the data attached to the time data to the collecting unit,
- wherein the collecting unit is configured to:
- (i) store the received data to the time series in the buffer based on the time data attached by the controller, when the data generated in each component is received through the controller;
- (ii) store empty data of only the time data in the buffer, when the data is not stored in the buffer for a prescribed period;
- and
- (iii) send the data having the time data attached to at least one of the host and the database of the semiconductor manufacturing plant side.
A control method for high frequent data collection between at least one of a host and a database of a semiconductor manufacturing plant side and a substrate processing apparatus having a plurality of components and including a collecting unit configured to collect data from the plurality of components, the method comprising:
- collecting data generated in each component of the substrate processing apparatus;
- attaching time data showing a collection time to the data generated in each component and transferring the data having the time data attached to the collecting unit, by a controller;
- attaching the time data to the data generated in each component by a control part for controlling each component based on a recipe for applying a prescribed processing to a substrate;
- attaching the time data to the data generated in each component and transferring the data attached to the time data to the collecting unit;
- transferring the data attached to the time data by the control part to the collecting unit, by an operation part for editing a target recipe;
- storing the received data to the time series in a buffer based on the time data attached by the controller, when the data generated in each component is received through the controller;
- storing empty data of only the time data in the buffer, when the data is not stored in the buffer for a prescribed period;
- and
- sending the data having the lime data attached to at least one of the host and the database of the semiconductor manufacturing plant side.
Dependencies are inferred from the claim text.