Substrate processing apparatus and display method of substrate processing apparatus

A substrate processing apparatus comprising a controller connected to:

• a manipulation unit configured to provide a manipulation screen through which a file is prepared or edited to process a substrate;
• and
• an attachment/detachment part to which an external storage device is attached to store a data generated when the file is executed, the controller being connected to the manipulation unit and the attachment/detachment part through communication lines and being configured to execute the file,
• wherein the manipulation unit configures the manipulation screen at least with a title panel always displayed at an upper region of the manipulation screen;
• an information panel for controlling or monitoring a task;
• and a navigation panel at a lower region of the manipulation screen, the navigation panel being unchanged even when a screen switching manipulation is carried out,
• wherein a button indicating the external storage device is attached to the attachment/detachment part is disposed on the navigation panel,
• wherein, when the external storage device is not attached to the attachment/detachment part, the controller disables the button indicating the external storage device is attached to the attachment/detachment part by displaying the button indicating the external storage device is attached to the attachment/detachment part in a color same as that of a background on the navigation panel, and
• wherein, when the external storage device is attached to the attachment/detachment part, the controller displays the button indicating the external storage device is attached to the attachment/detachment part on the navigation panel and displays on the information panel a setup screen listing the data to be written to the external storage device.

A method for controlling a substrate processing apparatus comprising a controller configured to control a display of a manipulation screen through which substrate processing information is manipulated;

• and an attachment/detachment part to which a removable external storage device is attached, the method comprising:
• configuring the manipulation screen with at least a title panel always displayed at an upper region of the manipulation screen;
• an information panel for controlling or monitoring a task;
• and a navigation panel at a lower region of the manipulation screen where navigation buttons are disposed;
• enabling a navigation button indicating the external storage device is attached to the attachment/detachment part by displaying the button on the navigation panel when the external storage device is attached to the attachment/detachment part, and displaying on the information panel a setup screen listing a substrate processing information to be written to the external storage device, and outputting a selected substrate processing information to the external storage device;
• and
• disabling the navigation button indicating the external storage device is attached to the attachment/detachment part by displaying the button in a color same as that of a background when the external storage device is not attached to the attachment/detachment part.