Method and system for filtering noises in an image scanned by charged particles
AssigneeHermes Microvision, Inc.
InventorsChad Liao, Futang Peng, Chuan Li, Alina Wang, Zhao-Li Zhang, Wei Fang, Jack Jau
Life of this patent
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Abstract
A method for filtering noises in an image scanned by charged particles includes steps of grouping pixels with similar types in the image into a plurality of pixel groups; and removing noises for each pixel group in the image according to a corresponding noise model to obtain the scanned image with better quality and/or contrast. A system for filtering noises in an image scanned by charged particles is also disclosed.
Claims18
A method for filtering noises in an image generated by a scanning device using charged particles to scan, comprising steps of:
- grouping pixels with similar types in the image into a plurality of pixel groups;
- and
- removing noises for each pixel group in the image according to a corresponding noise model;
- establishing different noise models corresponding to the plurality of pixel groups after the grouping step;
- determining quality conditions of the image;
- wherein the filtered image is acceptable when the quality conditions are accepted or within a threshold value after performing the removing step.
A non-transitory computer readable storage medium, encoded with a computer program implementing a method for filtering noises in an image scanned generated by a scanning device using charged particles to scan, wherein the method comprises steps of:
- grouping pixels with similar types in the image into a plurality of pixel groups;
- and
- removing noises for each pixel group in the image according to a corresponding noise model;
- establishing different noise models corresponding to the plurality of pixel groups after the grouping step;
- determining quality conditions of the image;
- wherein the filtered image is acceptable when the quality conditions are accepted or within a threshold value after performing the removing step.
A system for filtering noises in an image generated by a scanning device using charged particles to scan, comprising:
- a charged particle beam probe generator for generating a charged particle beam probe;
- a charged particle beam deflection module for scanning the charged particle beam probe across a surface of a sample;
- an image forming apparatus for detecting secondary charged particles emitted from the surface of the sample being bombarded by the charged particle beam probe and forming at least one scanned raw image accordingly;
- and
- a noise filtering module encoded with a computer program implementing a method for filtering noises in an image generated by a scanning device using charged particles to scan, wherein the method comprises steps of:
- grouping pixels with similar types in the image into a plurality of pixel groups;
- and
- removing noises for each pixel group in the image according to a corresponding noise model;
- establishing different noise models corresponding to the plurality of pixel groups after the grouping step;
- determining quality conditions of the image;
- wherein the filtered image is acceptable when the quality conditions are accepted or within a threshold value after performing the removing step.
A system for filtering noises in an image generated by a scanning device using charged particles to scan, comprising:
- means for grouping pixels with similar types in the image into a plurality of pixel groups;
- means for establishing different noise models corresponding to the plurality of pixel groups;
- means for removing noises for each pixel group in the image according to the corresponding noise model;
- and
- means for determining quality conditions of the image;
- wherein the filtered image is acceptable when the quality conditions are accepted or within a threshold value after performing the removing step.
Dependencies are inferred from the claim text.