Piezoelectric speaker and method of manufacturing the same
AssigneeElectronics and Telecommunications Research Institute
InventorsHye Jin Kim, Sung Q Lee, Min Cheol Shin, Kang Ho Park, Jong Dae Kim
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Abstract
A piezoelectric speaker and a method of manufacturing the same that can obtain a high sound pressure using a piezoelectric thin film are provided. The piezoelectric speaker includes a piezoelectric thin film, electrodes formed on an upper surface or upper and lower surfaces of the piezoelectric thin film, a damping material layer formed on the lower surface of the piezoelectric thin film, and a frame attached around at least one of the piezoelectric thin film and the damping material layer using an adhesive.
Claims19
A piezoelectric speaker, comprising:
- a piezoelectric thin film;
- an upper electrode disposed on an upper surface of the piezoelectric thin film;
- a damping material layer configured to reinforce output sound pressure in a frequency region between 100 Hz and 1 kHz and formed over the lower surface of the piezoelectric thin film;
- and
- a frame attached to at least two side surfaces of the damping material layer using an adhesive.
A method of manufacturing a piezoelectric speaker, comprising:
- forming an upper electrode on an upper surface of a piezoelectric thin film;
- forming a damping material layer on the lower surface of the piezoelectric thin film, wherein the damping material layer is configured to reinforce output sound pressure in a frequency region between 100 Hz and 1 kHz;
- and
- attaching a frame to at least two side surfaces of the damping material layer using an adhesive.
A method of manufacturing a piezoelectric speaker, comprising:
- forming a damping material layer on a silicon substrate, wherein the damping material layer is configured to reinforce output sound pressure in a frequency region between 100 Hz and 1 kHz;
- attaching a piezoelectric thin film, on which a first electrode is formed, to an upper surface of the damping material layer;
- and
- attaching a frame to at least two side surfaces of the damping material layer using an adhesive.
Dependencies are inferred from the claim text.