Fabrication of thin pellicle beam splitters
AssigneeHewlett-Packard Development Company, L.P.
InventorsJong-Souk Yeo, Sagi V. Mathai, Michael Renne Ty Tan
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Abstract
A method for fabricating a pellicle beam splitter includes etching an aperture in a support substrate; bonding a beam splitter substrate to an upper surface of the support substrate so that the beam splitter substrate covers the aperture; and depositing at least one optical coating on the beam splitter substrate. A pellicle beam splitter includes a support substrate, an aperture created in the support substrate using a semiconductor fabrication processes and a beam-splitting coating covering the aperture.
Claims20
A pellicle beam splitter comprising:
- a support substrate;
- a patterned substrate with an aperture, said patterned substrate being disposed on said support substrate;
- and
- a beam-splitting coating on said support substrate, wherein said beam-splitting coating is registered with and covering said aperture of said patterned substrate, said beam-splitting coating splitting an incident light beam into two perpendicular beams.
A method for fabricating a pellicle beam splitter comprising:
- etching an aperture in a patterned substrate;
- bonding a beam splitter substrate to an upper surface of said patterned substrate, said beam splitter substrate covering said aperture;
- and
- depositing at least one optical beam-splitting coating on said beam splitter substrate, wherein said beam-splitting coating is registered with and covering said aperture of said patterned substrate, said beam-splitting coating splitting an incident light beam into two perpendicular beams.
A method of fabricating a pellicle beam splitter on a unified substrate comprising:
- depositing a beam splitter layer on said unified substrate, said unified substrate being optically transmissive at a target optical wavelength, said unified substrate further being configured to provide structural support to said beam splitter layer;
- etching said unified substrate to create an indentation in said unified substrate, said indentation having a bottom surface, an antireflective coating being applied to said bottom surface.
A pellicle beam splitter comprising:
- a support substrate;
- a patterned substrate with an aperture, said patterned substrate being disposed on said support substrate;
- a beam-splitting coating on said support substrate, wherein said beam-splitting coating is registered with and covering said aperture of said patterned substrate, said beam-splitting coating splitting an incident light beam into two perpendicular beams;
- and
- an anti-reflective coating on said support substrate, said anti-reflective coating also being registered with and covering said aperture of said patterned substrate;
- wherein said anti-reflective coating is on a first side of said support substrate and said beam-splitting coating is on a second side of said support substrate and in said aperture of said patterned substrate.
A pellicle beam splitter comprising:
- a support substrate;
- a patterned substrate with an aperture, said patterned substrate being disposed on said support substrate;
- a beam-splitting coating on said support substrate, wherein said beam-splitting coating is registered with and covering said aperture of said patterned substrate, said beam-splitting coating splitting an incident light beam into two perpendicular beams;
- and
- an anti-reflective coating on said support substrate, said anti-reflective coating also being registered with and covering said aperture of said patterned substrate;
- wherein said anti-reflective coating and said beam-splitting coating are disposed on opposite sides of said support substrate, further wherein one of said anti-reflective coating and said beam-splitting coating is disposed between said support substrate and said patterned substrate.
Dependencies are inferred from the claim text.