Optical imaging device and imaging method for microscopy

A microscope, comprising:

• an illumination device configured to illuminate a substrate with at least one imaging ray, and
• a projection device,
• wherein the projection device is configured to project the at least one imaging ray onto an image receiver device, and the projection device comprises an optical imaging device which comprises a first optical element group and a second optical element group,
• wherein:
• during use of the optical imaging device, the first optical element group and the second optical element group, on an image plane of the optical imaging device, form an image of an object point of an object plane of the optical imaging device via at least one imaging ray having an imaging ray path,
• the first optical element group comprises a first optical element comprising a reflective first optical surface in the imaging ray path and a second optical element comprising a reflective second optical surface in the imaging ray path,
• the second optical element group comprises a third optical element comprising a concave reflective third optical surface in the imaging ray path and a fourth optical element comprising a convex reflective fourth optical surface in the imaging ray path having no light passage aperture,
• the reflective first optical surface is concave,
• the imaging ray path sequentially impinges on the reflective first, second, third and fourth optical surfaces,
• neither a refractive optical surface nor a reflective optical surface is present in the imaging ray path between the reflective first optical surface and the reflective second optical surface, and
• the imaging ray path does not impinge on a reflective optical surface between the reflective second optical surface and the reflective third optical surface.

A method, comprising:

• forming, via at least one imaging ray, an image of object point of an object field on an image plane using a first optical element group and a second optical element group,
• wherein:
• the first optical element group comprises a first optical element comprising a reflective first optical surface in the imaging ray path and a second optical element comprising a reflective second optical surface in the imaging ray path,
• the second optical element group comprises a third optical element comprising a concave reflective third optical surface in the imaging ray path and a fourth optical element comprising a convex reflective fourth optical surface in the imaging ray path having no light passage aperture,
• the reflective first optical surface is concave,
• the imaging ray path sequentially intersects the reflective first, second, third and fourth optical surfaces,
• neither a refractive optical surface nor a reflective optical surface is present in the imaging ray path between the reflective first optical surface and the reflective second optical surface,
• the imaging ray path does not impinge on a reflective optical surface between the reflective second optical surface and the reflective third optical surface, and
• the first optical element and/or the second optical element and/or the third optical element has a central passage aperture for the at least one imaging ray.

An optical imaging device comprising:

• a first optical element group, and
• a second optical element group,
• wherein:
• during use of the optical imaging device, the first optical element group and the second optical element group, on an image plane of the optical imaging device, form an image of an object point of an object plane of the optical imaging device via at least one imaging ray having an imaging ray path,
• the first optical element group comprises a first optical element comprising a reflective first optical surface in the imaging ray path and a second optical element comprising a reflective second optical surface in the imaging ray path,
• the second optical element group comprises a third optical element comprising a concave reflective third optical surface in the imaging ray path and a fourth optical element comprising a convex reflective fourth optical surface in the imaging ray path having no light passage aperture,
• the reflective first optical surface is concave,
• the imaging ray path sequentially impinges on the reflective first, second, third and fourth optical surfaces,
• neither a refractive optical surface nor a reflective optical surface is present in the imaging ray path between the reflective first optical surface and the reflective second optical surface,
• the imaging ray path does not impinge on a reflective optical surface between the reflective second optical surface and the reflective third optical surface, and
• the reflective second optical surface is concave.

An optical imaging device comprising:

• a first optical element group, and
• a second optical element group,
• wherein:
• during use of the optical imaging device, the first optical element group and the second optical element group, on an image plane of the optical imaging device, form an image of an object point of an object plane of the optical imaging device via at least one imaging ray having an imaging ray path,
• the first optical element group comprises a first optical element comprising a reflective first optical surface in the imaging ray path and a second optical element comprising a reflective second optical surface in the imaging ray path,
• the second optical element group comprises a third optical element comprising a concave reflective third optical surface in the imaging ray path and a fourth optical element comprising a convex reflective fourth optical surface in the imaging ray path having no light passage aperture,
• the reflective first optical surface is concave,
• the imaging ray path sequentially impinges on the reflective first, second, third and fourth optical surfaces,
• neither a refractive optical surface nor a reflective optical surface is present in the imaging ray path between the reflective first optical surface and the reflective second optical surface,
• the imaging ray path does not impinge on a reflective optical surface between the reflective second optical surface and the reflective third optical surface, and
• during use of the optical imaging device, the first optical element group and the second optical element group image the object point to infinity.

A method, comprising:

• forming, via at least one imaging ray, an image of object point of an object field on an image plane using a first optical element group and a second optical element group,
• wherein:
• the first optical element group comprises a first optical element comprising a reflective first optical surface in the imaging ray path and a second optical element comprising a reflective second optical surface in the imaging ray path,
• the second optical element group comprises a third optical element comprising a concave reflective third optical surface in the imaging ray path and a fourth optical element comprising a convex reflective fourth optical surface in the imaging ray path having no light passage aperture,
• the reflective first optical surface is concave,
• the imaging ray path sequentially intersects the reflective first, second, third and fourth optical surfaces,
• neither a refractive optical surface nor a reflective optical surface is present in the imaging ray path between the reflective first optical surface and the reflective second optical surface,
• the imaging ray path does not impinge on a reflective optical surface between the reflective second optical surface and the reflective third optical surface, and
• the reflective second optical surface is concave.