High damage threshold frequency conversion system
AssigneeKLA-Tencor Corporation
InventorJ. Joseph Armstrong
Life of this patent
Estimating the term…
Loading patent…
AssigneeKLA-Tencor Corporation
InventorJ. Joseph Armstrong
Estimating the term…
The present invention includes a fundamental laser light source configured to generate fundamental wavelength laser light, a first nonlinear optical crystal configured to generate first alternate wavelength light; a second nonlinear optical crystal configured to generate second alternate wavelength light; a dual wavelength Brewster angle waveplate configured to rotate a polarization of the first alternate wavelength light relative to the second alternate wavelength light such that the first and second alternate wavelength light have the same polarization; a set of Brewster angle wavefront processing optics configured to condition the first and second alternate wavelengths of light; a harmonic separator configured to separate the first alternate wavelength light from the second alternate wavelength light; and a Brewster angle output window configured to transmit the first or second alternate wavelengths of light from the interior of a laser frequency conversion system to the exterior of the laser frequency conversion system.
An apparatus for laser frequency conversion having a high damage threshold, comprising:
An apparatus for laser frequency conversion having a high damage threshold, comprising:
A method for laser frequency conversion with high damage threshold, comprising:
Dependencies are inferred from the claim text.