Moving structure and micro-mirror device using the same
AssigneePanasonic Corporation
InventorsHideki Ueda, Hiroshi Noge, Kiyohiko Kawano, Hiroaki Tachibana
Life of this patent
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Abstract
In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units of ladder shape with honeycombed portions are formed by twin supporting rods and crosspieces bridged between the twin supporting rods so as to support the moving plate rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units by the honeycombed portions of the hinge units.
Claims14
A moving structure, comprising:
- a moving plate;
- beam shaped hinge units which pivot the moving plate swingably;
- and
- a frame unit which supports the hinge units, wherein
- each of the hinge units has a ladder shape having twin supporting rods and crosspieces bridged between the twin supporting rods,
- the twin supporting rods which are bridged by the crosspieces are not disposed in parallel with each other in a planar view, and
- an outer side and an inner side of each of the twin supporting rods are parallel with each other.
A moving structure comprising:
- a moving plate;
- beam shaped hinges which pivot the moving plate swingably;
- and
- a frame which supports the hinges, wherein
- each of the hinges has a ladder shape having twin supporting rods and crosspieces bridged between the twin supporting rods,
- the twin supporting rods are not disposed in parallel with each other in a planar view, and
- each of the hinges has a set of crosspieces, and the crosspieces are crossed and coupled to each other between the twin support rods.
A moving structure comprising:
- a moving plate;
- beam shaped hinges which pivot the moving plate swingably;
- and
- a frame which supports the hinges, wherein
- each of the hinges has a ladder shape having twin supporting rods and crosspieces bridged between the twin supporting rods,
- the twin supporting rods are not disposed in parallel with each other in a planar view, and
- the twin supporting rods are curved lines.
Dependencies are inferred from the claim text.