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US 8,711,459 B2Granted
Micromechanical component, device for beam deflection of monochromatic light, and spectrometer
AssigneeRobert Bosch GmbH
InventorMirko Hattass
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Abstract
A micromechanical component includes a micromechanical unidimensional optical lattice structure for diffracting an incident light beam, and a linear drive connected to the lattice structure for compressing and/or stretching the lattice structure in the plane of the lattice structure. The lattice structure is of elastic design with regard to a change of shape resulting from the compressing and/or stretching. The micromechanical component may be incorporated in a device for beam deflection of monochromatic light or in a spectrometer.
Claims18
A micromechanical component, comprising:
- a substrate;
- a functional layer situated parallel to the substrate and at a distance from the substrate;
- a micromechanical unidimensional optical lattice structure configured to diffract an incident light beam;
- and
- a linear drive including a first drive unit that is connected to the optical lattice structure and includes a first component and a second component that are movable relative to each other;
- wherein:
- the first component is located between the two parallel planes;
- the linear drive is configured to provide at least one of compression and stretching of the optical lattice structure in a plane of the optical lattice structure;
- the optical lattice structure is configured to be elastic with regard to a change of shape resulting from the at least one of compression and stretching;
- and
- the optical lattice structure, the linear drive, and a suspension structure are formed on the functional layer.
8 more elements
Dependencies are inferred from the claim text.