Position-measuring device
AssigneeDr. Johannes Heidenhain GmbH
InventorMarkus Meissner
Life of this patent
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Abstract
A position-measuring device, for ascertaining the position of two objects which are disposed in a manner allowing movement relative to each other in at least one measuring direction, includes a light source, as well as a splitting device by which a light beam, provided by the light source, is split into two or more partial beams of rays. The partial beams of rays traverse at least two partial-beam paths. Interfering partial beams of rays from the partial-beam paths strike a plurality of opto-electronic detector elements, so that displacement-dependent position signals are ascertainable via the detector elements. The light source takes the form of a semiconductor laser having a fiber-grating feedback device.
Claims39
A position-measuring device for ascertaining a position of two objects which are disposed in a manner allowing movement relative to each other in at least one measuring direction, comprising:
- a light source;
- a splitter device, by which a light beam, provided by the light source, is split into at least two partial beams of rays;
- at least two partial-beam paths traversed by the partial beams of rays;
- and
- a plurality of opto-electronic detector elements arranged to receive interfering partial beams of rays from the partial-beam paths, displacement-dependent position signals ascertainable via the detector elements;
- wherein the light source includes a semiconductor laser having fiber-grating a feedback device to operate the light source in pulsed manner;
- and
- wherein the semiconductor laser and the fiber-grating feedback device are coupled at least partially to a temperature-setting device adapted to operate the semiconductor laser and the fiber-grating feedback device at temperatures at which a phase jitter of the displacement-dependent position signals is minimized.
Dependencies are inferred from the claim text.