Stroboscopic light source for a transmitter of a large scale metrology system
AssigneeNikon Corporation
InventorMichael Sogard
Life of this patent
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Abstract
A stroboscopic light source (22) for a transmitter (14) of a metrology system (10) the monitors the position or shape of an object (12) includes a source housing (224) and a pulsed light generator (232). The stroboscopic light source (22) emits a pulsed beam (20) that is used to identify the transmitter (14). The source housing (224) defines a housing cavity (226) and includes an inlet port (228) and one or more outlet ports (230). The pulsed light generator (232) generates the pulsed beam (20) that is directed into the housing cavity (226) via the inlet port (228). Subsequently, the pulsed beam (20) emits from the outlet ports (230) of the source housing (224).
Claims20
A transmitter for use in a metrology system, the transmitter comprising:
- a beam generator that generates a pair of moving beams;
- and
- a stroboscopic light source including (i) a source housing that defines a housing cavity, the source housing including an inlet port and an outlet port;
- and (ii) a pulsed light generator that generates a pulsed beam that is directed into the housing cavity via the inlet port, the pulsed beam emitting from the outlet port of the source housing.
A metrology system that monitors the position or shape of a structure, the metrology system comprising:
- a target adapted to be positioned near the structure;
- a beam generator that generates a pair of moving beams that scan across the target;
- a transmitter head that rotates about a first axis, the transmitter head including a first head aperture and a second head aperture, wherein one of the moving beams is emitted through the first head aperture, and wherein the other of the moving beams is emitted through the second head aperture;
- and
- a stroboscopic light source including (i) a source housing that defines a substantially spherical shaped housing cavity, the source housing including an inlet port and an outlet port;
- (ii) a pulsed light generator that generates a pulsed beam that is directed into the housing cavity via the inlet port;
- and (iii) an optical fiber that transmits the pulsed beam from the pulsed light generator to the inlet port of the housing cavity;
- and
- wherein the stroboscopic light source emits the pulsed beam from the outlet port of the source housing toward the target.
A method for monitoring the position or shape of a structure, the method comprising the steps of:
- positioning a target near the structure;
- generating a pair of moving beams that scan across the target with a beam generator;
- providing a source housing that defines a housing cavity, the source housing including an inlet port and an outlet port;
- generating a pulsed beam that is directed into the housing cavity via the inlet port with a pulsed light generator;
- and
- emitting the pulsed beam from the outlet port of the source housing toward the target.
Dependencies are inferred from the claim text.