Loading patent…
AssigneeCarl Zeiss SMT GmbH
InventorsJens Kugler, Franz Sorg, Yim-Bun Patrick Kwan
Estimating the term…
There is provided an optical module for an objective. The optical module includes (a) a first holding device with an inner circumference, which extends in a first circumferential direction, (b) at least one first supporting device for supporting a first optical element and being fixed at said inner circumference of said first holding device, (c) an annular circumferential first assembly space being defined by displacing said first supporting device once in a revolving manner along said first circumferential direction, (d) at least one second supporting device being provided for supporting a second optical element and being fixed at said inner circumference of said first holding device, and (e) an annular circumferential second assembly space being defined by displacing said second supporting device once in a revolving manner along said first circumferential direction. The first assembly space intersects the second assembly space.
An optical module comprising:
An optical module comprising:
An optical module comprising:
Dependencies are inferred from the claim text.
Drawings are temporarily unavailable. Open the PDF at USPTO
From the US filing history. Foreign family members aren’t listed.
Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus: mounting of individual elements, e.g.…
Mountings, adjusting means, or light-tight connections, for optical elements
For lenses: for more than one lens
For lenses: permitting adjustment
About 11 months of term left · ends 26 Sep 2027 (estimated)
The present invention relates to an optical module for an objective. The invention can be used in connection with microlithography employed in the production of microelectronic circuits. It further concerns, therefore, an objective barrel which is suitable in particular for application in a microlithographic apparatus, as well as such a microlithographic apparatus including such an objective barrel.
In the field of microlithography in particular, it is necessary for the employed optical elements of the objective barrel, i.e. the lenses for example, to be positioned spatially with respect to one another with as high a degree of precision as possible, in order to achieve a suitably high image quality. The high precision requirements are not least a consequence of the constant demand to increase the resolution of optical systems used in the production of microelectronic circuits, in order to advance the miniaturisation of the microelectronic circuits to be produced.
With the increased resolution, the demands increase on the positioning precision of the employed optical elements. The latter must be maintained as far as possible in the installed state over the whole service life in order to avoid image errors. Furthermore, there is in this regard the requirement to achieve a dynamic behaviour of the employed optical system that is as favourable as possible, with resonant frequencies that are as high as possible.
FIG. 1 is a schematic sectional representation of a preferred embodiment of the optical module according to the invention
FIG. 2 is a schematic plan view of the optical module from FIG. 1;
FIG. 3 is a schematic representation of a preferred embodiment of the microlithographic apparatus according to the invention with an objective barrel according to the invention;
First Embodiment
A first preferred embodiment of the optical module 1 according to the invention for an objective for microlithography is first described with reference to FIGS. 1 and 2. FIG. 1 shows a diagrammatic sectional representation of the optical module 1, whilst FIG. 2 shows a schematic plan view of optical module 1 in the direction of module axis 1.1 of optical module 1. FIG. 1 is a cross-section along section line I-I from FIG. 2.
Optical module 1 includes a first holding device in the form of an annular holder 2, which is often referred to as a flange. This holder 2 has an inner circumference 2.1, which extends in a first circumferential direction 2.2. Three first supporting devices in the form of first bipods 3.1 (shown in very simplified form) are fixed with one end at the inner circumference 2.1 of the holder 2. First bipods 3.1 are connected with their other end to a first mounting device in the form of a first mounting 4.1. This first mounting 4.1 in turn carries a first optical element in the form of a lens 5.1. Accordingly, the first bipods 3.1 thus support the first lens 5.1 via the first mounting 4.1 on the first holder 2. In other words, the first lens 5.1 is thus fixed via the first mounting 4.1 and the first bipods 3.1 on the first holder 2.