Exposure method, exposure apparatus, and method for producing device
AssigneeNikon Corporation
InventorShigeru Hirukawa
Life of this patent
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Abstract
An exposure method exposes a substrate by projecting an image of a pattern onto the substrate through a liquid by using a projection optical system while moving the substrate in a predetermined direction. A temperature distribution of the liquid in a direction intersecting the predetermined direction is measured. A projection state of the image of the pattern is adjusted on the basis of information about the measured temperature distribution. The substrate is exposed to the image of the pattern in the projection state.
Claims45
An exposure method for exposing a substrate with an exposure light beam through a liquid while moving the substrate in a predetermined direction, the exposure method comprising:
- obtaining a temperature of the liquid in a plurality of positions regarding a direction intersecting the predetermined direction;
- supplying liquids of different temperatures on the basis of information about the obtained temperature of the liquid;
- and
- exposing the substrate through the supplied liquids of the different temperatures.
An exposure apparatus which exposes a substrate via a projection optical system and a liquid, the exposure apparatus comprising:
- a first supply port through which a liquid with a first temperature is supplied;
- and
- a second supply port through which a liquid with a second temperature is supplied onto an object,
- wherein the first temperature and the second temperature are different from each other.
A control method of an exposure apparatus which exposes a substrate via a projection optical system and a liquid, the method comprising:
- supplying a liquid with a first temperature through a first supply port;
- and
- supplying a liquid with a second temperature through a second supply port onto an object,
- wherein the first temperature and the second temperature are different from each other.
Dependencies are inferred from the claim text.