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US 8,710,934 B2Granted
Atomic oscillator and manufacturing method
AssigneeSeiko Epson Corporation
InventorsYoshiyuki Maki, Tetsuo Nishida
Life of this patent
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Abstract
An atomic oscillator includes: a light-receiving element including a light-receiving section; a cell layer that is laminated on the light-receiving element and includes a cavity having an opening above the light-receiving section; gaseous alkali metal atoms sealed in the cavity; a transparent member to close the opening; and a light-emitting element to emit resonance light to the light-receiving section through the transparent member and the alkali metal atoms.
Claims2
An atomic oscillator comprising:
- a semiconductor element comprising a light-receiving element including a light-receiving section, the light-receiving section being coated with an oxide film;
- a cover glass that is coupled to the light-receiving element and includes a cavity formed therein above the light-receiving section, the cover glass including a first section unitary therewith that overlaps the cavity that has a thickness less than second sections on opposing sides of the cavity;
- gaseous alkali metal atoms sealed in the cavity;
- and
- a light-emitting element to emit resonance light to the alkali metal atoms through the first section,
- wherein an open end of the cavity exposes the gaseous metal atoms to the oxide film, and
- the oxide film is sandwiched between the cover glass and the light-receiving element.
4 more elements
Dependencies are inferred from the claim text.