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US 8,710,855 B2Granted
Probe card holding apparatus with probe card engagement structure
AssigneeAdvantest Corporation
InventorsKatsuhiko Namiki, Shigeaki Naito
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Abstract
A probe card holding apparatus is provided and may be configured to hold a probe card in a test head. The probe card may include a clamp head formed at a center part of a back surface of the probe card, and a holding device provided at the test head and configured to engage with the clamp head.
Claims5
A probe card holding apparatus configured to hold a probe card in a test head, comprising:
- a clamp head formed at a center part of a back surface of the probe card and including a ring-shaped wall projecting toward the test head, the ring-shaped wall having a circumferential groove;
- a holding device provided at the test head and configured to detachably engage with the circumferential groove of the clamp head;
- an abutting device extending toward the probe card and abutting against the back surface of the probe card;
- and
- a fixing device configured to fix and release the abutting device in a state where the abutting device abuts against the back surface of the probe card.
2 more elements
A probe card holding apparatus configured to hold a probe card in a test head, comprising:
- a clamp head formed at a center part of a back surface of the probe card and including a ring-shaped wall projecting toward the test head, the ring-shaped wall having a circumferential groove;
- and
- a holding device provided at the test head and configured to detachably engage with the circumferential groove of the clamp head, wherein
- the holding device includes a plurality of balls disposed in a circumferential direction thereof and the plurality of balls are configured to engage with the circumferential groove of the clamp head.
1 more element
Dependencies are inferred from the claim text.