Materials and methods for stress reduction in semiconductor wafer passivation layers
AssigneeDesigner Molecules, Inc.
InventorsStephen M Dershem, Farhad G Mizori, James T Huneke
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Abstract
The present invention provides polyimide polymer materials for passivating semiconductor wafers and methods for fabricating thereof. The present invention further provides a device that includes a semiconductor wafer and a passivating layer disposed on the surface of the wafer, wherein the passivating layer comprises such polyimide polymers.
Claims22
A device, comprising a semiconductor wafer and a passivating layer disposed on the surface of the wafer, wherein the passivating layer is comprised of a polyimide polymer comprising a structure selected from the group consisting of structures I, II and III:
- wherein:
- each of R, R3 and Q is independently selected from the group consisting of substituted or unsubstituted aliphatic, alkenyl, aromatic, heteroaromatic and siloxane moieties;
- R2 in each of structures I, II and III is independently selected from the group consisting of H or methyl;
- R4 is selected from the group consisting of substituted or unsubstituted linear, branched, cyclic aliphatic or alkenyl moieties having between 2 and about 500 carbon atoms, and substituted or unsubstituted aromatic moieties;
- n is an integer having the value between 1 to about 10;
- and
- the symbol “” depicts a macromolecular chain to which the structure II or III is covalently attached,
- with the further proviso that in the polyimide polymer, the molecular weight fraction of the combined contents of nitrogen and oxygen is less than about 20%.
Dependencies are inferred from the claim text.