Optical sensor and electronic apparatus
AssigneeSeiko Epson Corporation
InventorsAkira Uematsu, Yoshiyuki Terashima, Yoichi Sato, Atsushi Matsuo
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Abstract
An optical sensor includes an impurity region for a photodiode and an angle limiting filter limiting the incidence angle of incidence light incident to a light receiving area of the photodiode, which are formed on a semiconductor substrate. The angle limiting filter is formed by at least a first plug corresponding to a first insulating layer and a second plug corresponding to a second insulating layer located in an upper layer of the first insulating layer. Between the first plug and the second plug, there is a gap area having a gap space that is equal to or less than λ/2.
Claims20
An optical sensor comprising:
- an impurity region, which is formed on a semiconductor substrate, used for a photodiode;
- and
- an angle limiting filter that limits an incidence angle of incidence light incident to a light receiving area of the photodiode,
- wherein the angle limiting filter is formed at least by a first plug corresponding to a first insulating layer and a second plug corresponding to a second insulating layer that is located in an upper layer of the first insulating layer, and
- wherein, in a case where a wavelength of the incidence light is denoted by λ, a gap area having a gap space that is equal to or less than λ/2 is arranged between the first plug and the second plug.
Dependencies are inferred from the claim text.