Electronic component and a system and method for producing an electronic component
AssigneeInfineon Technologies AG
InventorsPhilipp Riess, Henning Feick, Martin Wendel
Life of this patent
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Abstract
In a method for producing an electronic component, a substrate is doped by introducing doping atoms. In the doped substrate, at least one connection region of the electronic component is formed by doping with doping atoms. Furthermore, at least one additional doped region is formed at least below the at least one connection region by doping with doping atoms. Furthermore, at least one well region is formed in the substrate by doping with doping atoms in such a way that the well region doping is blocked at least below the at least one additional doped region.
Claims14
An electronic component, comprising:
- a doped substrate;
- at least one doped connection region formed in the doped substrate;
- at least one doped region formed in the doped substrate at least below the at least one doped connection region, the at least one doped region being formed as an ESD region for protection against electrostatically generated discharges;
- at least one well region having a well doping concentration, which is lower than a doping concentration of the doped connection region, formed in the doped substrate;
- and
- at least one predefined region formed below the at least one doped region;
- wherein the at least one well region is formed in such a way that at least one well region doping is blocked at least below the at least one doped region to form the at least one predefined region and a doping intensity of the at least one predefined region corresponds to a doping intensity of the doped substrate;
- wherein the at least one well region surrounds the at least one predefined region;
- and
- wherein the at least one well region and the at least one predefined region are doped with the same type of doping atoms.
Dependencies are inferred from the claim text.