MOS device for eliminating floating body effects and self-heating effects
AssigneeShanghai Institute of Microsystem and Information Technology, Chinese Academy of Science
InventorsXiaolu Huang, Jing Chen, Xi Wang, Deyuan Xiao
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Abstract
A SOI MOS device for eliminating floating body effects and self-heating effects are disclosed. The device includes a connective layer coupling the active gate channel to the Si substrate. The connective layer provides electrical and thermal passages during device operation, which could eliminate floating body effects and self-heating effects. An example of a MOS device having a SiGe connector between a Si active channel and a Si substrate is disclosed in detail and a manufacturing process is provided.
Claims6
A MOS device for eliminating floating body effects and self-heating effects, the MOS device comprising:
- a semiconductor substrate;
- a Si active region formed on the substrate, wherein the active region including a gate channel, a source region and a drain region formed at the two opposite ends of the gate channel;
- a gate region formed over the gate channel;
- a buried insulation layer formed between the substrate and the source and drain regions;
- a SiGe isolation layer formed between the gate channel and the substrate as an electric and thermo passage between them, wherein the SiGe isolation layer is formed by priority epitaxial growing and selective etch process and is in contact with the substrate;
- and
- a shallow trench isolation region located surrounding the active region.
Dependencies are inferred from the claim text.