Extreme ultraviolet light generation apparatus

An apparatus used with an external laser apparatus for generating extreme ultraviolet light, the apparatus comprising:

• a target storage unit configured to store a target material thereinside;
• a nozzle unit having a through-hole through which the target material stored inside the target storage unit is outputted, the through-hole formed therein being in fluid communication with the interior of the storage unit;
• an electrode facing the nozzle unit, the electrode having a through-hole formed therein;
• a target detector configured to detect a target formed of the target material and output a detection signal;
• a chamber in which extreme ultraviolet light is generated;
• a direct current voltage adjuster configured to apply a direct current between the target material and the electrode, the direct current voltage adjuster being capable of adjusting the direct current;
• a pressure adjuster configured to apply a pressure to the target material through gas, the pressure adjuster being capable of adjusting the pressure;
• and
• a controller configured to control at least one of the direct current voltage adjuster and the pressure adjuster based on the detection signal from the target detector.