Loading patent…
AssigneeNippon Control System Corporation
InventorsDai Tsunoda, Masahiro Shoji, Hiroyuki Tsunoe, Shuji Hada, Ayuko Sato
Estimating the term…
Stored energy is evaluated for each of segmented regions, and using the evaluated stored energy, an optimal irradiation amount for an electron beam is evaluated by a conjugate gradient method. The evaluated stored energy is used instead of calculating a determinant (Apk) in the procedure that includes calculation of the determinant (Apk) from among repeated calculation procedures that follow the conjugate gradient method and seek to answer a simultaneous linear equation (Ax=b) with a matrix (A) as a coefficient. Thus it is possible to evaluate the optimal irradiation amount for an electron beam with a high processing speed and a high degree of accuracy, and without expressly requiring the calculation of Apk, by managing the giant matrix (A) comprising numerous factors according to reduction of lines of circuitry in a circuit pattern.
A method of evaluating an optimal irradiation amount of an electron beam for drawing a given pattern onto the sample, said method comprising:
An apparatus for evaluating an optimal irradiation amount of an electron beam for drawing a given pattern onto a sample by irradiating the electron beam in accordance with the evaluated optimal irradiation amount in a drawing device, the apparatus comprising:
A non-transitory computer-readable storage medium containing a program executable by a computer to perform a method of evaluating an optimal irradiation amount of an electron beam for drawing a given pattern onto the sample, said method comprising:
Dependencies are inferred from the claim text.