Pyroelectric detector, pyroelectric detection device, and electronic instrument
AssigneeSeiko Epson Corporation
InventorTakafumi Noda
Life of this patent
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Abstract
A pyroelectric detector includes a substrate, a support member, a spacer member, and a pyroelectric detecting element. The spacer member supports the support member over the substrate with a cavity part being formed therebetween. The pyroelectric detecting element includes a first electrode mounted on the support member, a second electrode, and a pyroelectric body between the first and second electrodes. The support member includes an insulating layer, a first wiring layer disposed on a side of the second surface of the support member with respect to the insulating layer, and a first plug passing through the insulating layer at a position where the pyroelectric body and the first wiring layer overlap in plan view to connect the first wiring layer with the first electrode.
Claims20
A pyroelectric detector comprising:
- a substrate;
- a support member including a first surface and a second surface opposite from the first surface;
- a spacer member connected to the substrate and supporting the support member so that a cavity part is formed between the substrate and the second surface of the support member;
- and
- a pyroelectric detecting element supported on the first surface of the support member, the pyroelectric detecting element including a first electrode mounted on the support member, a second electrode opposed to the first electrode, and a pyroelectric body arranged between the first and second electrodes,
- the support member including an insulating layer, a first wiring layer disposed on a side of the second surface of the support member with respect to the insulating layer, and a first plug passing through the insulating layer at a position where the pyroelectric body and the first wiring layer overlap in plan view to connect the first wiring layer with the first electrode.
Dependencies are inferred from the claim text.