Sensor chip, sensor cartridge, and analysis apparatus
AssigneeSeiko Epson Corporation
InventorsJun Amako, Kohei Yamada
Life of this patent
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Abstract
A sensor chip includes: a substrate that has a planar portion; and a diffraction grating, on which a target substance is placed, that includes a plurality of first protrusions periodically arranged in a period equal to or greater than 100 nm and equal to or less than 1000 nm in a first direction that is parallel to the planar portion, a plurality of base portions that is located between two of the first protrusions adjacent to each other and configures a base of the substrate, and a plurality of second protrusions that is formed on upper faces of the plurality of the first protrusions, has a surface formed from a metal, and is formed on the planar portion.
Claims20
A sensor chip comprising:
- a substrate that has a planar portion;
- and
- a diffraction grating on the planar portion and having a metal surface, the diffraction grating having a target substance thereon and including:
- a plurality of first protrusions periodically arranged in a period equal to or greater than 100 nm and equal to or less than 1000 nm in a first direction parallel to the planar portion;
- a plurality of base portions that are located between two adjacent first protrusions and that configure a base of the substrate;
- and
- a plurality of second protrusions that are periodically arranged on upper faces of the plurality of first protrusions.
A sensor chip comprising:
- a substrate that has a planar portion;
- and
- a diffraction grating having a composite pattern in the planar portion and a metal surface, the diffraction grating having a target substance thereon and superimposedly including:
- a first protrusion pattern in which a plurality of first protrusions is periodically arranged in a period equal to or greater than 100 nm and equal to or less than 1000 nm;
- and
- a second protrusion pattern in which a plurality of second protrusions is periodically arranged in the plurality of first protrusions in a period shorter than that of the first protrusion pattern.
Dependencies are inferred from the claim text.