Encoder that detects positional information of a moving body generating interference fringes that move in opposite directions
AssigneeNikon Corporation
InventorsSusumu Makinouchi, Akihiro Watanabe, Toru Imai
Life of this patent
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Abstract
An encoder includes: a light modulation section which modulates at least a portion of light that is emitted from a light source; a moving member which has an incidence plane, on which a plurality of light beams of the light incident, and is relatively movable in at least one direction; and at least two light receiving sections which respectively receive interference fringes that are generated in at least two regions on the moving member, wherein the light enters into the moving member such that at least two interference fringes move in opposite directions on the moving member in accordance with a modulation by the light modulation section.
Claims11
An encoder comprising:
- a light modulation section that is configured to modulate a wavelength of light emitted from a light source section;
- an optical member that is configured to split the light into four light beams;
- a moving member that has a diffraction grating at an incidence plane and is configured to move in at least one direction, the incidence plane having a first region and a second region, the first region into which a first light beam having a relatively short optical path length and a third light beam having a relatively long optical path length are entered, the second region into which a second beam having a relatively short optical path length and a fourth beam having a relatively long optical path length are entered, entering axes of the first and third beams into the incidence plane having a symmetrical relationship with respect to a direction, entering axes of the second and fourth beams into the incidence plane having a symmetrical relationship with respect to the direction, entering axes of the first and second beams into the incidence plane having a symmetrical relationship with respect to the direction;
- and
- two light receiving sections that receive a first interfering light and a second interfering light respectively, the first interfering light being formed by an interference of the first and third light beams at the diffraction grating, the second interfering light being formed by an interference of the second and fourth light beams at the diffraction grating,
- wherein the split light enters into the moving member such that an interference fringe of the first interfering light and an interference fringe of the second interfering light move in mutually opposite directions on the moving member, based on the modulation by the light modulation section.
Dependencies are inferred from the claim text.