Solid-state image pickup element, method of manufacturing the same, and image pickup apparatus including the same

A method of manufacturing a solid-state image pickup element, the method comprising the steps of:

• forming a photodiode in a silicon substrate;
• forming a silicon oxide film onto said photodiode, a plasma being used to form said silicon oxide film;
• and
• forming a first film onto said silicon oxide film, said silicon oxide film being in physical contact with said photodiode and said first film,
• wherein said first film is an oxide of a metal, an oxynitride of the metal, a nitride of the metal, or an oxide of a rare earth element.