Back to results
US 8,709,941 B2Granted
Method for forming contact in an integrated circuit
AssigneeAdvanced Micro Devices, Inc.
InventorPaul R. Besser
Life of this patent
Estimating the term…
Abstract
A method for forming an integrated circuit system includes providing an integrated circuit device; and forming an integrated contact over the integrated circuit device including: providing a via over the integrated circuit device; forming a selective metal in the via; forming at least one nanotube over the selective metal; and forming a cap over the nanotubes.
Claims19
A method for forming an integrated circuit system comprising:
- providing an integrated circuit device;
- and
- forming an integrated contact over the integrated circuit device including:
- providing a via over the integrated circuit device;
- forming a selective metal in the via such that said selective metal is electrically connected to said integrated circuit device;
- growing at least one nanotube in the via, over the selective metal;
- and
- forming a cap over the nanotubes.
5 more elements
A method for forming an integrated circuit system comprising:
- providing an integrated circuit device having a contact surface;
- and
- forming an integrated contact over the contact surface including:
- forming a via over the contact surface;
- forming a selective metal in the via over the contact surface such that said selective metal is electrically connected to said contact surface;
- growing at least one nanotube in the via, over the selective metal over the contact surface;
- and
- forming a cap over the nanotubes partially in the via.
5 more elements
A method for forming an integrated contact over an integrated circuit device, said method comprising:
- forming a via over the integrated circuit device;
- forming a selective metal in the via such that said selective metal is electrically connected to said integrated circuit device;
- growing at least one nanotube in the via, over the selective metal;
- forming a cap over the at least one nanotube.
1 more element
Dependencies are inferred from the claim text.