Selenium/group 3A ink and methods of making and using same
AssigneeRohm and Haas Electronic Materials LLC
InventorsKevin Calzia, David Mosley, David L. Thorsen
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Abstract
A selenium/Group 3a ink, comprising (a) a selenium/Group 3a complex which comprises a combination of, as initial components: a selenium component comprising selenium; a carboxylic acid component having a formula R—COOH, wherein R is selected from a C1-10 alkyl, C1-10 haloalkyl and a C1-10 mercaptoalkyl; a Group 3a complex, comprising at least one Group 3a material selected from aluminum, indium, gallium and thallium complexed with a multidentate ligand; and, (b) a liquid carrier; wherein the selenium/Group 3a complex is stably dispersed in the liquid carrier.
Claims15
A selenium/Group 3a ink, comprising:
- (a) a selenium/Group 3a complex which comprises a combination of, as initial components:
- a selenium powder;
- a carboxylic acid component having a formula R—COOH, wherein R is selected from the group consisting of a C1-10 alkyl, C1-10 haloalkyl and a C1-10 mercaptoalkyl;
- a Group 3a complex, comprising at least one Group 3a material complexed with a multidentate ligand;
- wherein the Group 3a material is selected from the group consisting of aluminum, indium, gallium and thallium;
- and wherein the multidentate ligand is selected from the group consisting of butanedionate;
- pentanedionate;
- hexanedionate;
- heptanedionate;
- cyclohexanedionate;
- and 1,1,1,5,5,5-hexafluoroacetylacetone;
- and,
- (b) a liquid carrier, wherein the liquid carrier is a nitrogen containing solvent selected from:
- an amine solvent having two nitrogen atoms per molecule, wherein the nitrogen atoms are separated by at least three carbon atoms in an aliphatic chain or the nitrogen atoms are both contained in an unsaturated ring structure;
- and,
- an amine solvent having at least three nitrogen atoms per molecule;
- wherein the selenium powder, the carboxylic acid component and the Group 3a complex do not form a precipitate upon combination in the liquid carrier;
- wherein the selenium powder and the Group 3a complex form a complex incorporating both selenium and the Group 3a material;
- and,
- wherein the selenium/Group 3a ink is hydrazine free and hydrazinium free.
A method of preparing a selenium/Group 3a ink, consisting essentially of:
- providing a selenium powder;
- providing a carboxylic acid component having a formula R—COOH, wherein R is selected from the group consisting of 2-mercaptopropionic acid, formic acid, trifluoracetic acid, acetic acid, propionic acid and mixtures thereof;
- providing a Group 3a complex, comprising at least one Group 3a material complexted with a multidentate ligand;
- wherein the Group 3a material is selected from the group consisting of aluminum, indium, gallium and thallium;
- and wherein the multidentate ligand is selected from the group consisting of butanedionate;
- pentanedionate;
- hexanedionate;
- heptanedionate;
- cyclohexanedionate;
- and 1,1,1,5,5,5-hexafluoroacetylacetone;
- providing a liquid carrier, wherein the liquid carrier is a nitrogen containing solvent selected from (a) an amine solvent having two nitrogen atoms per molecule, wherein (i) the nitrogen atoms are separated by at least 3 carbon atoms in an aliphatic chain or (ii) the nitrogen atoms are both contained in an unsaturated ring structure (e.g., an imidazole ring);
- and (b) an amine solvent having three or more nitrogen atoms per molecule;
- combining the selenium powder, the carboxylic acid component, the Group 3a complex and the liquid carrier to form the selenium/Group 3a ink;
- wherein the selenium powder, the carboxylic acid component and the Group 3a complex do not form a precipitate upon combination in the liquid carrier;
- wherein the selenium powder and the Group 3a complex form a complex incorporating both selenium and the Group 3a material;
- and,
- wherein the selenium/Group 3a ink is hydrazine free and hydrazinium free.
Dependencies are inferred from the claim text.