Method for producing semiconductor substrate, semiconductor substrate, method for manufacturing electronic device, and reaction apparatus

A method of producing a semiconductor wafer by thermally processing a base wafer having a portion to be thermally processed that is to be thermally processed, the method comprising:

• forming an inhibition layer on the base wafer;
• forming an opening in a region of the inhibition layer;
• providing, within the inhibition layer opening, a portion to be heated that generates heat through absorption of an electromagnetic wave and selectively heats the portion to be thermally processed;
• forming an electronic element in the base wafer
• applying an electromagnetic wave to the base wafer;
• and
• lowering the lattice defect density of the portion to be thermally processed, by means of the heat generated by the portion to be heated through the absorption of the electromagnetic wave, wherein
• the providing the portion to be heated on the base wafer includes providing the portion to be heated having an absorptive layer such that a ratio of the amount of heat to be generated to the amount of energy of the electromagnetic wave to be applied is higher than the ratio of the amount of the heat to be generated to the amount of the energy of the electromagnetic wave when the electromagnetic wave is applied to the portion to be thermally processed, the absorptive layer having been provided above the portion to be thermally processed, wherein
• an upper temperature limit of the electronic element is lower than the temperature at which the portion to be thermally processed is annealed.