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US 8,709,881 B2Granted
Direct chemical vapor deposition of graphene on dielectric surfaces
AssigneeThe Regents of the University of California
InventorsYuegang Zhang, Ariel Ismach
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Abstract
A substrate is provided that has a metallic layer on a substrate surface of a substrate. A film made of a two dimensional (2-D) material, such as graphene, is deposited on a metallic surface of the metallic layer. The metallic layer is dewet and/or removed to provide the film on the substrate surface.
Claims28
A method of providing a two-dimensional (2-D) material on a substrate, comprising:
- providing the substrate having a substrate surface and a metallic layer formed on the substrate surface, wherein the metallic layer has a metallic surface;
- depositing a film on the metallic surface, wherein the film comprises the 2-D material;
- and
- dewetting the metallic layer so that the film is provided on the substrate surface.
1 more element
A method of creating graphene, comprising:
- providing a substrate having a substrate surface and a metallic layer formed on the substrate surface, wherein the metallic layer has a metallic surface;
- depositing a carbon-based film on the metallic surface, wherein the carbon-based film comprises the graphene;
- and
- dewetting the metallic layer so that the carbon-based film is provided on the substrate surface.
1 more element
Dependencies are inferred from the claim text.