Sensor packages and method of packaging dies of differing sizes
AssigneeFreescale Semiconductor, Inc.
InventorPhilip H. Bowles
Life of this patent
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AssigneeFreescale Semiconductor, Inc.
InventorPhilip H. Bowles
Estimating the term…
A method (90) entails placing (124) sensor elements (122) in an array (126) arranged to correspond with locations of controller dies (24) in a controller wafer (94) and encapsulating (128) the array (126) in a mold material (74) to form a panel (130) of the sensor elements (122). The sensor elements (122) include bond pads (42) that are concealed by a material section (116, 118) of the sensor elements (122). The controller wafer (94) is bonded (134) to the panel (130) to form a stacked wafer structure (136). After bonding, methodology (90) entails forming (140) conductive elements (60) on the controller wafer (95), removing material sections (100) from the controller wafer (94) and removing the material sections (116, 118) from the sensor elements (122) to expose the bond pads (42), forming (148) electrical interconnects (56), applying (152) packaging material (64), and singulating to produce sensor packages (20, 76).
A method of forming electronic component packages comprising:
A method of forming electronic component packages comprising:
A method of forming sensor packages comprising:
A method of forming electronic component packages comprising:
Dependencies are inferred from the claim text.