Method of manufacturing crystalline silicon solar cells with improved surface passivation

A method of manufacturing a crystalline silicon solar cell, comprising:

• providing a crystalline silicon solar cell substrate having a front side and a back side, wherein said crystalline silicon solar cell substrate is an n-type substrate;
• surface texturing said crystalline silicon solar cell substrate by chemically etching said crystalline silicon solar cell;
• after said surface texturing, creating a p-type layer in said front side of said crystalline silicon solar cell substrate;
• subsequently soaking the crystalline silicon solar cell substrate in a chemical solution for forming by oxidation of said crystalline silicon solar cell substrate a thin silicon oxide passivation film on at least one of said front and said back side;
• and
• forming a dielectric coating film on said thin silicon oxide passivation film on at least one of said front and said back side, wherein said thin silicon oxide passivation film is formed by treatment of said crystalline silicon substrate in said chemical solution at a temperature under 150° C.;
• wherein said thin silicon oxide passivation film is formed with a thickness of 0.5-10 nm.