Method for production of a thermoelectric apparatus

A method for production of at least one thermoelectric apparatus with the steps of:

• providing of a first wafer, which is formed of a thermoelectric material of a first conductivity type;
• providing of a second wafer, which is formed of a thermoelectric material of a second conductivity type;
• structuring of the first wafer, so that a group of first thermoelectric structures is produced;
• structuring of the second wafer, so that a group of second thermoelectric structures is produced;
• linking of the first to the second wafer in such a manner that the first and the second thermoelectric structures are electrically connected together and thus form the thermoelectric apparatus,
• wherein before the structuring of the first wafer a first electrically conductive contact material is deposited onto the first wafer and before the structuring of the second wafer a second electrically conductive contact material is deposited on the second wafer;
• wherein after linking the first to the second wafer the first and the second contact material each form an electrical connection between the first and the second thermoelectric structures, wherein
• the first and the second contact material are deposited using a mask arranged on the respective wafer so that
• the first and the second contact material form in each case a plurality of first and second contacts, wherein the first and the second contacts form the electrical connection between the first and the second thermoelectric structures, whereby
• the mask remains on the wafer and isolates in each case the first and the second contacts electrically from each other.